The use of soft lithography to fabricate arrays of Schottky diode

Advanced Materials

Volumn 10, Issue 8, 1998, Pages 574-577

  Hu, Junmin ^a   Beck, Rex G ^b   Westervelt, Robert M ^b   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; MOLDING; SCHOTTKY BARRIER DIODES; SEMICONDUCTING SILICON;

MICROMOLDING IN CAPILLARIES (MIMIC);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032474408     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1521-4095(199805)10:8<574::aid-adma574>3.0.co;2-d     Document Type: Article

References (21)

1. Y Xia, G. M. Whitesides, Angew. Chem. Int. Ed. 1998, 37, 550.
2. S. T. Brittain, K. E. Paul, X.-M. Zhao, G. M. Whitesides, Phys. World 1998, in press.
3. H. C. Haverkorn van Rijsewijk, P. E. J. Legierse, G. E. Thomas, Philips Tech. Rev. 1982, 40, 287.
4. B. D. Terris, H. J. Mamin, M. E. Best, J. A. Logan, D. Rugar, S. A. Rishton, Appl. Phys. Lett. 1996, 69, 4262.
5. J. Haisma, M. Verheijen, K. van den Heuvel, J. van den Berg, J. Vac. Sci. Technol. B 1996, 14, 4124.
6. S. Y. Chou, P. R. Krauss, P. J. Renstrom, Science 1996, 272, 85.
7. H. W. Lehmann, R. Widmer, M. Ebnoether, J. Vac. Sci. Technol. B 1983, 1, 1207.
8. H. Masuda, K. Fukuda, Science 1995, 268, 1466.
9. X.-M. Zhao, A. Stoddart, S. P. Smith, E. Kim, Y. Xia, M. Prentiss, G. M. Whitesides, Adv. Mater. 1996, 8, 420.
10. J. A. Rogers, R. J. Jackman, O. J. A. Schueller, G. M. Whitesides, Appl. Opt. 1996, 35, 6641.
11. C. S. Effenhauser, G. J. M. Bruin, A. Paulus, M. Ehrat, Anal. Chem. 1997, 69, 3451.
12. J. M. Hu, R. G. Beck, T. Deng, R. M. Westervelt, K. D. Maranowski, A. C. Gossard, G. M. Whitesides, Appl. Phys. Lett. 1997, 77, 2020.
13. O. J. A. Schueller, S. T. Brittain, G. M. Whitesides, Adv. Mater. 1997, 9, 477.
14. D. Qin, Y. Xia, G. M. Whitesides, Adv. Mater. 1996, 8, 917.
15. 2.
16. X.-M. Zhao, Y. Xia, G. M. Whitesides, J. Mater. Chem. 1997, 7, 1069.
17. E. Kim, Y. Xia, G. M. Whitesides, Nature 1995, 376, 581.
18. D. L. Schilling, C. Belove, in Electronic Circuits, Discrete and Integrated, 2nd ed. (Ed: S. W. Director), McGraw-Hill Series in Electrical Engineering, McGraw-Hill, New York 1979.
19. R. S. Muller, T. I. Kamins, Device Electronics for Integrated Circuits, 2nd ed., Wiley, New York 1986.
20. bi are two constants related to doping concentration and Schottky barrier height.
21. J. A. Rogers, K. E. Paul, G. M. Whitesides, J. Vac. Sci. Technol. B 1997, in press.