Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 2, 2000, Pages 683-689

  Yang, C S ^a   Smith, L L ^a   Arthur, C B ^a   Parsons, G N ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CURBS; GLASS; INFRARED SPECTROSCOPY; LOW TEMPERATURE PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILANES; SUBSTRATES;

AMORPHOUS SILICON THIN FILM TRANSISTORS;

THIN FILM TRANSISTORS;

EID: 0034156168     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591259     Document Type: Article

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