First reliability test of a surface micromachined microengine using SHiMMeR

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3224, Issue , 1997, Pages 14-23

  Tanner, Danelle M ^a   Smith, Norman F ^a   Bowman, Duane J ^a   Eaton, William P ^a   Peterson, Ken A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Failure in micromachines; MEMS reliability; Micro mechanical component reliability; Micromachine reliability

Indexed keywords

AUTOMATED SYSTEMS; COMPUTER CONTROLLED; FAILURE IN MICROMACHINES; FAILURE RATES; INFANT MORTALITIES; MEMS RELIABILITY; MICRO ENGINES; MICRO-MECHANICAL COMPONENT RELIABILITY; MICROMACHINE RELIABILITY; MICROMACHINED; MOVING PARTS; RELIABILITY DATUMS; RELIABILITY METHODS; RELIABILITY TESTS; SANDIA NATIONAL LABORATORIES; STRESS TESTS; TESTING SYSTEMS; USEFUL LIVES;

COMPOSITE MICROMECHANICS; COMPUTER CONTROL SYSTEMS; FAILURE ANALYSIS; MAGNETIC STORAGE; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DEVICES; RELIABILITY; SAFETY FACTOR;

QUALITY ASSURANCE;

EID: 0344239354     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284512     Document Type: Conference Paper

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