Measurement and modeling of surface micromachined, electrostatically actuated microswitches

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1145-1148

  Majumder, Sumit ^a   McGruer, N E ^a   Zavracky, Paul M ^a   Adams, George G ^a   Morrison, Richard H ^a   Krim, Jacqueline ^a  

^a NORTHEASTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTRIC RESISTANCE; ELECTRIC RESISTANCE MEASUREMENT; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SCANNING ELECTRON MICROSCOPY;

CONTACT RESISTANCE; CONTACT RESISTANCE MODEL; ELECTROSTATIC ACTUATION; MICROGRAPH; MICROSWITCHES; SURFACE MICROMACHINING;

ELECTRIC SWITCHES;

EID: 0030675959     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)