Reliability methodology for prediction of micromachined accelerometer stiction

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1999, Pages 202-205

  Hartzell, Allyson ^a   Woodilla, David ^a  

^a ANALOG DEVICES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; FAILURE (MECHANICAL); FATIGUE OF MATERIALS; MATHEMATICAL MODELS; MICROMACHINING; PROBABILITY DISTRIBUTIONS; RELIABILITY; STICTION;

MICROMACHINED ACCELEROMETER; PREDICTION MODEL;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0032670478     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (9)