Performance trade-offs for a surface micromachined microengine

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2882, Issue , 1996, Pages 182-191

  Miller, Samuel L ^a   Sniegowski, Jeffry J ^a   LaVigne, Glenn ^a   McWhorter, Paul J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FRICTIONAL FORCES; INERTIAL FORCES; MICROENGINES; VISCOUS DAMPING FORCES;

ACTUATORS; CONTROL SYSTEMS; DAMPING; ELECTRIC DRIVES; ENGINES; FORCE MEASUREMENT; FRICTION; MICROMACHINING; PERFORMANCE; VISCOSITY;

MICROELECTROMECHANICAL DEVICES;

EID: 0030384976     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)