Micromachined magnetic actuators using electroplated permalloy

IEEE Transactions on Magnetics

Volumn 35, Issue 3 PART 2, 1999, Pages 1976-1985

  Liu, Chang ^a   Yi, Yong W ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Magnetic actuators; Permalloy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTROPLATING; FILM PREPARATION; IRON ALLOYS; MAGNETIC LEVITATION; MICROACTUATORS; MICROMACHINING; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; THIN FILMS;

MAGNETIC ACTUATORS; PERMALLOY; TORSIONAL BEAMS;

MAGNETIC DEVICES;

EID: 0033121869     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.764895     Document Type: Article

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