Dry-release method based on polymer columns for microstructure fabrication

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 77-81

  Mastrangelo, C H ^a   Saloka, G S ^a  

^a FORD MOTOR COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTROMECHANICAL DEVICES; ETCHING;

DRY-RELEASE METHOD; MICROSTRUCTURE FABRICATION; POLYMER COLUMNS;

SENSORS;

EID: 0027186802     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)