Magnetic microactuation of torsional polysilicon structures

Sensors and Actuators, A: Physical

Volumn 53, Issue 1-3, 1996, Pages 392-397

  Judy, Jack W ^a,b   Muller, Richard S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

Microactuators; Micromirrors; Microphotonic; NiFe; Polysilicon

Indexed keywords

EID: 10044295157     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01138-7     Document Type: Article

References (12)

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