A Fully Integrated Surface Micromachined Magnetic Microactuator with a Multilevel Meander Magnetic Core

Journal of Microelectromechanical Systems

Volumn 2, Issue 1, 1993, Pages 15-22

  Ahn, Chong H ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETIC DEVICES; SOLENOIDS;

FULLY INTEGRATED MAGNETIC MICROACTUATOR; LOW-RESISTANCE MEANDER CONDUCTORS; MEANDER-TYPE SOLENOID COILS; MULTILEVEL MEANDER MAGNETIC CORE; NICKEL IRON CANTILEVER BEAM; SURFACE MICROMACHINING TECHNIQUES;

ACTUATORS;

EID: 0027562316     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.232590     Document Type: Article

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