Magnetic Microactuation of Polysilicon Flexure Structures

Journal of Microelectromechanical Systems

Volumn 4, Issue 4, 1995, Pages 162-169

  Judy, Jack W ^a   Muller, Richard S ^a   Zappe, Hans H ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROPLATING; LITHOGRAPHY; MAGNETIC THIN FILMS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NICKEL ALLOYS; SEMICONDUCTING SILICON; TORQUE;

BATCH FABRICATION PROCESS; DISPLACEMENT; MAGNETIC MICROACTUATION; MICROACTUATORS; POLYSILICON FLEXURE STRUCTURES;

MICROELECTRONIC PROCESSING;

EID: 0029431075     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.475542     Document Type: Article

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