Microactuators with moving magnets for linear, torsional or multiaxial motion

Sensors and Actuators: A. Physical

Volumn 32, Issue 1-3, 1992, Pages 598-603

  Wagner, B ^a   Benecke, W ^a   Engelmann, G ^b   Simon, J ^b  

^a FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

^b TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS - DESIGN; ACTUATORS - ELECTROMAGNETIC FIELD EFFECTS; BEAMS AND GIRDERS - DEFLECTION; MAGNETS - APPLICATIONS; SEMICONDUCTING SILICON - MICROSTRUCTURE;

ELECTROMAGNETIC FORCES; MICROACTUATORS; MICROMACHINED SILICON DEVICES; TORSIONAL DEFLECTIONS; VERTICAL DEFLECTIONS;

ACTUATORS;

EID: 0026853721     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(92)80050-D     Document Type: Article

References (13)

1. A vibrating cantilever magnetic field sensor
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4. An optically-addressed silicon strain sensor
5. The design and fabrication of a magnetically actuated micromachined flow valve
6. Microfabricated actuator with moving permanent magnet
7. Magnetic micro-actuator
8. Electromagnetic microactuators with multiple degrees of freedom
9. Development of a fine pitch bumping process
10. High depth to width aspect ratio in thick positive photoresist layers using near UV lithography
11. Plating of microstructures for sensors
12. Multi electron beam lithography: fabrication of a control unit