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Volumn , Issue , 1994, Pages 57-62
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Surface micromachined magnetic actuators
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CONTROL SYSTEMS;
DESIGN;
ELECTRIC COILS;
ELECTROSTATICS;
FREQUENCY RESPONSE;
MAGNETIC FIELDS;
MICROMACHINING;
STRESSES;
THIN FILMS;
ELECTROCHEMICAL DEPOSITION;
ELECTROMAGNETIC DRIVING;
MAGNETIC FORCES;
PERMALLAY;
SURFACE MICROMACHINED MAGNETIC ACTUATORS;
THERMAL ACTUATION;
ACTUATORS;
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EID: 0028096352
PISSN: None
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (44)
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References (25)
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