Surface micromachined magnetic actuators

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 57-62

  Liu, Chang ^a   Tsao, Tom ^a   Tai, Yu Chong ^a   Ho, Chih Ming ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL SYSTEMS; DESIGN; ELECTRIC COILS; ELECTROSTATICS; FREQUENCY RESPONSE; MAGNETIC FIELDS; MICROMACHINING; STRESSES; THIN FILMS;

ELECTROCHEMICAL DEPOSITION; ELECTROMAGNETIC DRIVING; MAGNETIC FORCES; PERMALLAY; SURFACE MICROMACHINED MAGNETIC ACTUATORS; THERMAL ACTUATION;

ACTUATORS;

EID: 0028096352     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (25)