Silicon as a Mechanical Material

Proceedings of the IEEE

Volumn 70, Issue 5, 1982, Pages 420-457

  Petersen, Kurt E ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON - MECHANICAL PROPERTIES;

SILICON AND ALLOYS;

EID: 0020127035     PISSN: 00189219     EISSN: 15582256     Source Type: Journal    
DOI: 10.1109/PROC.1982.12331     Document Type: Article

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