Fracture strain of LPCVD polysilicon.

Volumn , Issue , 1988, Pages 88-91

  Tai, Y C ^a   Muller, R S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS -- MATERIALS; BEAMS AND GIRDERS -- THEORY; HEAT TREATMENT -- ANNEALING; SENSORS -- MATERIALS; STRAIN;

FRACTURE STRAIN; HIGH-TEMPERATURE ANNEALING; LOW-PRESSURE CHEMICAL VAPOR DEPOSITION; NONLINEAR BEAM THEORY; POLYSILICON BRIDGE-SLIDER STRUCTURE;

SILICON AND ALLOYS;

EID: 0024136892     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)