DLC films deposited by bipolar pulsed DC PACVD

Diamond and Related Materials

Volumn 7, Issue 2-5, 1998, Pages 459-462

  Michler, T ^a   Grischke, M ^a   Traus, I ^a   Bewilogua, K ^a   Dimigen, H ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

D.C. plasma chemical vapour deposition; Diamond like carbon (DLC); High pressure; Mechanical properties

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; HIGH PRESSURE EFFECTS; MECHANICAL PROPERTIES; PLASMAS; THIN FILMS;

BIPOLAR PULSED DC PACVD;

COATINGS;

EID: 0031996181     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00236-7     Document Type: Article

References (11)

1. H. Dimigen, H. Hübsch, Philips Tech. Rev. 41 (6) (1983) 186-197.
2. A. Matthews, S.S. Eskildsen, Diamond Relat. Mater. 3 (1994) 902-911.
3. D. Hofmann, H. Schuessler, K. Bewilogua, H. Hübsch, J. Lemke, Surf. Coat. Technol. 73 (1995) 137-141.
4. K. Oguri, T. Arai, Surf. Coat. Technol. 47 (1991) 710-721.
5. A. Grill, V.V. Patel, Diamond Films Technol. 1 (4) (1992) 219-233.
6. H. Zaidi, T. Le Huu, F. Robert, R. Bedri, E.K. Kadiri, D. Paulmeier, Surf. Coat. Technol. 7677 (1995) 564-571.
7. Y. Catherine, P. Couderc, Thin Solid Films 144 (1986) 265-280.
8. C. Barholm-Hansen, M.D. Bentzon, M.E. Vigild, E. Findeisen, R. Feidenhans, J. Bindslev Hansen, Surf. Coat. Technol. 6869 (1994) 702-707.
9. C. Gomez-Aleixandre, O. Sanchez, J.M. Albella, J. Vac. Sci. Technol. A 11 (1) (1993) 143-146.
10. M. Shimozuma, G. Tochitani, H. Tagashira, J. Appl. Phys. 70 (2) (1991) 645-648.
11. C.-P. Klages, R. Memming, Mater. Sci. Forum 5253 (1989) 609-644.