Properties of tetrahedral amorphous carbon deposited by a filtered cathodic vacuum arc

Materials Research Society Symposium - Proceedings

Volumn 423, Issue , 1996, Pages 299-304

  Chhowalla, M ^a   Chen, C W ^a   Kleinsorge, B ^a   Robertson, J ^a   Amaratunga, G A J ^a   Milne, W I ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DENSITY (SPECIFIC GRAVITY); DEPOSITION; ENERGY GAP; THERMAL EFFECTS;

AMORPHOUS CARBON; FILTERED CATHODIC VACUUM ARCS (FCVA); ION ENERGY;

AMORPHOUS FILMS;

EID: 0030386547     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-423-299     Document Type: Conference Paper

References (17)