Deposition and properties of doped diamondlike carbon films produced by dual-source vacuum arc plasma immersion

Materials Research Society Symposium - Proceedings

Volumn 438, Issue , 1996, Pages 599-604

  Monteiro, O R ^a   Delplancke Ogletree, M P ^a   Brown, I G ^a   Ager III, J W ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL BONDS; DEPOSITION; HARDNESS; ION IMPLANTATION; MICROSTRUCTURE; PLASMA APPLICATIONS; SEMICONDUCTOR DOPING; SPALLING; THERMODYNAMIC STABILITY; VACUUM APPLICATIONS; WEAR RESISTANCE;

CHEMICAL CHARACTERIZATION; DIAMOND LIKE CARBON FILMS; DUAL SOURCE VACUUM ARC PLASMA IMMERSION; MAGNETIC FILTERING; RELATIVE PULSE DURATION;

SEMICONDUCTING FILMS;

EID: 0030370235     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-438-599     Document Type: Conference Paper

References (15)