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Volumn 97, Issue 1-3, 1997, Pages 23-32

Mechanisms in ion-assisted deposition of superhard coatings: Cubic boron nitride-tetrahedral amorphous carbon

Author keywords

Cubic boron nitride; Growth models; Ion assisted deposition; Tetrahedral amorphous carbon

Indexed keywords

ADHESION; AMORPHOUS FILMS; CARBON INORGANIC COMPOUNDS; CRYSTAL ATOMIC STRUCTURE; CRYSTAL LATTICES; DEPOSITION; FILM GROWTH; ION BEAMS; NUCLEATION; STRESS RELAXATION;

EID: 0031347402     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00390-3     Document Type: Article
Times cited : (17)

References (86)
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    • Reinke, S.1    Kuhr, M.2    Kulisch, W.3
  • 74
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.