EELS analysis of hydrogenated diamond-like carbon films

Thin Solid Films

Volumn 319, Issue 1-2, 1998, Pages 97-100

  Ponsonnet, L ^a   Donnet, C ^a   Varlot, K ^a   Martin, J M ^a   Grill, A ^b   Patel, V ^b  

^a LABORATOIRE DE TRIBOLOGIE ET DYNAMIQUE DES SYSTÈMES   (France)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Carbon; Diamond like carbon films; Electron energy loss spectroscopy; Graphite

Indexed keywords

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; ELECTRON BEAMS; ELECTRON ENERGY LOSS SPECTROSCOPY; GRAPHITE; HYDROGEN;

DIAMOND LIKE CARBON (DLC) FILMS; PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION (PACVD);

DIAMOND FILMS;

EID: 0032047236     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)01094-8     Document Type: Article

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