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Brazilian Journal of Physics

Volumn 27, Issue 2, 1997, Pages 302-313

Silicon oxidation and oxynitridation in the ultrathin regime: Ion scattering studies

(4) Gusev, E P a Lu, H C a Gustafsson, T a Garfunkel, E a

a RUTGERS UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031506198 PISSN: 01039733 EISSN: None Source Type: Journal
DOI: None Document Type: Review

Times cited : (5)

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