An ion scattering study of the interaction of oxygen with Si(111): Surface roughening and oxide growth

Surface Science

Volumn 351, Issue 1-3, 1996, Pages 111-128

  Lu, H C ^a   Gusev, E P ^a   Garfunkel, E ^a   Gustafsson, T ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

Etching; Low index single crystal surfaces; Medium energy ion scattering (MEIS); Metal oxide semiconductor (MOS) structures; Oxidation; Silicon; Silicon oxides; Surface structure, morphology, roughness, and topography

Indexed keywords

ETCHING; HIGH TEMPERATURE EFFECTS; MORPHOLOGY; MOS DEVICES; OXIDATION; OXIDES; OXYGEN; PRESSURE EFFECTS; SEMICONDUCTOR DEVICE STRUCTURES; SILICON COMPOUNDS; SINGLE CRYSTALS; SURFACE ROUGHNESS;

ACTIVE OXIDATION; LOW INDEX SINGLE CRYSTAL SURFACES; MEDIUM ENERGY ION SCATTERING; PASSIVE OXIDATION; SURFACE TOPOGRAPHY;

SEMICONDUCTING SILICON;

EID: 0030143738     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/0039-6028(95)01351-2     Document Type: Article

References (84)

1. T. Engel, Surf. Sci. Rep. 18 (1993) 91.
2. E. Irene, Critical Rev. Solid State Mater. Sci. 14 (1988) 175.
3. F.W. Smith and G. Ghidini, J. Electrochem. Soc. 129 (1982) 1300.
4. V.D. Borman, E.P. Gusev, Yu.Yu. Lebedinski and V.I. Troyan, Phys. Rev. B 49 (1994) 5415.
5. M.P. D'Evelyn, M.M. Nelson and T. Engel, Surf. Sci. 186 (1987) 75.
6. J.R. Engstrom, D.J. Bonser and T. Engel, Surf. Sci. 268 (1992) 238.
7. A. Feltz, U. Memmert and R.J. Behm, Chem. Phys. Lett. 192 (1992) 271.
8. A. Feltz, U. Memmert and R.J. Behm, Surf. Sci. 314 (1994) 34.
9. J.M. Gibson and M.Y. Lanzerotti, Nature 340 (1989) 128.
10. N.F. Mott, S. Rigo, F. Rochet and A.M. Stoneham, Philos. Mag. B 60 (1989) 189.
11. F.M. Ross, J.M. Gibson and R.D. Twesten, Surf. Sci. 310 (1994) 243.
12. J. Seiple, J. Pecquet, Z. Meng and J.P. Pelz, J. Vac. Sci. Technol. A 11 (1993) 1649.
13. C.J. Sofield and A.M. Stoneham, Semicond. Sci. Technol. 10 (1995) 215.
14. J.J. Lander and J. Morrison, J. Appl. Phys. 33 (1962) 2089.
15. J. Seiple and J.P. Pelz, Phys. Rev. Lett. 73 (1994) 999.
16. J. Seiple and J.P. Pelz, J. Vac. Sci. Technol. A 13 (1995) 772.
17. M.R. Baklanov, V.N. Kruchinin, S.M. Repinsky and A.A. Shklyaev, React. Solids 7 (1989) 1.
18. A.A. Shklyaev and T. Suzuki, Phys. Rev. Lett. 75 (1995) 272.
19. K. Onishi and T. Hattori, Jpn. J. Appl. Phys. 33 (1994) L676.
20. V.D. Borman, E.P. Gusev, Y.Y. Lebedinski and V.I. Troyan, Phys. Rev. Lett. 67 (1991) 2387.
21. M. Tabe, T.T. Chiang, I. Lindau and W.E. Spicer, Phys. Rev. B 34 (1986) 2706.
22. F.J. Himpsel, F.R. McFeely, A. Taleb-Ibrahimi, J.A. Yarmoff and G. Hollinger, Phys. Rev. B 38 (1988) 6084.
23. 2 Interface, II, Eds. by C.R. Helms and B.E. Deal (Plenum, New York, 1993) p. 237.
24. F.M. Leibsle, A. Samsavar and T.C. Chiang, Phys. Rev. B 38 (1988) 5780.
25. P. Avouris and I.-W. Lyo, Surf. Sci. 242 (1991) 1.
26. U. Neuwald, H.E. Kessel, A. Feltz, U. Memmert and R.J. Behm, Appl. Phys. Lett. 60 (1992) 1307.
27. Y. Ono, M. Tabe and H. Kageshima, Phys. Rev. B 48 (1993) 14291.
28. M. Udagawa, M. Niwa and I. Sumita, Jpn. J. Appl. Phys. 33 (1994) 375.
29. P. Avouris and D. Cahill, Ultramicroscopy 42/44 (1992) 838.
30. F. Lutz, L. Kubler, J.L. Bischoff and D. Bolmont, Phys. Rev. B 40 (1989) 11747.
31. T. Horie, Y. Takakuwa and N. Miyamoto, Jpn. J. Appl. Phys. 33 (1994) 4684.
32. M.L. Lozano and M.C. Tringides, Europhys. Lett. 30 (1995) 537.
33. F.J. Grunthaner and P.J. Grunthaner, Mater. Sci. Rep. 1 (1986) 65.
34. P.J. Grunthaner, M.H. Hecht, F.J. Grunthaner and N.M. Johnson, J. Appl. Phys. 61 (1987) 629.
35. G. Hollinger and F.J. Himpsel, Phys. Rev. B 28 (1983) 3851.
36. G. Hollinger, J.F. Morar, F.J. Himpsel, G. Hughes and J.L. Jordan, Surf. Sci. 168 (1986) 609.
37. G. Hollinger, E. Bergignat, H. Chermette, F. Himpsel, D. Lopez, M. Lannoo and M. Bensoussan, Philos. Mag. B 55 (1987) 735.
38. H. Ibach, H.D. Bruchmann and H. Wagner, Appl. Phys. A 29 (1982) 113.
39. Z.H. Lu, M.J. Graham, D.T. Jiang and K.H. Tan, Appl. Phys. Lett. 63 (1993) 2941.
40. M.M. Banaszak-Holl and F.R. McFeely, Phys. Rev. Lett. 71 (1993) 2441.
41. M.M. Banaszak-Holl, S. Lee and F.R. McFeely, Appl. Phys. Lett. 65 (1994) 1097.
42. H. Kageshima and M. Tabe, in: Control of Semiconductor Interfaces, Eds. I. Ohdomari, M. Oshima and A. Hiraki (Elsevier, Amsterdam, 1994) p. 227.
43. A. Pasquarello, M.S. Hybertsen and R. Car, Phys. Rev. Lett. 74 (1995) 1024.
44. R.D. Twesten, J.M. Gibson and F.M. Ross, MRS Bull. 29 (1994) 38.
45. R.E. Walkup and S. Raider, Appl. Phys. Lett. 53 (1988) 888.
46. D. Rioux, F. Stepniak, R.J. Pechman and J.H. Weaver, Phys. Rev. B 51 (1995) 10981.
47. M. Chander, D.A. Goetsch, C.M. Aldao and J.H. Weaver, Phys. Rev. Lett. 74 (1995) 2014.
48. N. Shimizu, Y. Tanishiro, K. Kobayashi, K. Takayanagi and K. Yagi, Ultramicroscopy 18 (1985) 453.
49. K. Yagi, Surf. Sci. Rep. 17 (1993) 305.
50. K. Wurm, R. Kliese, Y. Hong, B. Rottger, Y. Wei, H. Neddermeyer and I.S.T. Tsong, Phys. Rev. B 50 (1994) 1567.
51. A.V. Latyshev, A.L. Aseev, A.B. Krasilnikov and S.I. Stenin, Surf. Sci. 213 (1989) 157.
52. J.M. Bermond, J.J. Metois, J.C. Heyraud and C. Alfonso, Surf. Sci. 331-333 (1995) 855.
53. P. Bedrossian and E. Kaxiras, Phys. Rev. Lett. 70 (1993) 2589.
54. P. Bedrossian and T. Klitsner, Phys. Rev. B 44 (1991) 13783.
55. B.S. Swartzentruber, C.M. Matzke, D.L. Kendall and J.E. Houston, Surf. Sci. 329 (1995) 83.
56. D.G.J. Sutherland, H. Akatsu, M. Copel, F.J. Himpsel, T. Callcott, J.A. Carlisle, D. Ederer, J.J. Jia, I. Jimenez, R. Perera, D.K. Shun, L.J. Terminello and W.M. Tong, J. Appl. Phys. 78 (1995) 6761.
57. V.D. Borman, O.V. Tapinskaya, V.N. Tronin and V.I. Troyan, Phys. Low-Dim. Struct. 6 (1994) 7.
58. V.D. Borman, O.V. Tapinskaya, V.N. Tronin and V.I. Troyan, JETP Lett. 60 (1994) 718.
59. J.F. van der Veen, Surf. Sci. Rep. 5 (1985) 199.
60. R.M. Tromp, M. Copel, M.C. Reuter, M.H. van Hoegen, J. Speidell and R. Koudijs, Rev. Sci. Instrum. 62 (1991) 2679.
61. R. Tromp, G.W. Rubloff, P. Balk, F.K. DeGoues and E.J. van Loenen, Phys. Rev. Lett. 55 (1985) 2332.
62. R.M. Tromp and E.J. van Loenen, Surf. Sci. 155 (1985) 441.
63. J. Vrijmoeth, P.M. Zagwijn, J.W.M. Franken and J.F. van der Veen, Phys. Rev. Lett. 67 (1991) 1134.
64. P. Statiris, H.C. Lu and T. Gustafsson, Phys. Rev. Lett. 72 (1994) 3574.
65. P. Fenter and T. Gustafsson, Phys. Rev. B 43 (1991) 12195.
66. M.A. Briere and J.P. Biersack, Nucl. Instrum. Methods B 64 (1992) 693.
67. E.P. Gusev, H.C. Lu, T. Gustafsson and E. Garfunkel, in: Interface Control of Electrical, Chemical, and Mechanical Properties, Eds. S.P. Murarka, K. Rose, T. Ohmi and T. Seidel (MRS, Pittsburgh, PA, 1994) p. 69.
68. E.P. Gusev, H.C. Lu, T. Gustafsson and E. Garfunkel, Phys. Rev. B 52 (1995) 1759.
69. H.C. Lu, T. Gustafsson, E.P. Gusev and E. Garfunkel, Appl. Phys. Lett. 67 (1995) 1742.
70. F. Besenbacher, J.U. Andersen and E. Bonderup, Nucl. Instrum. Methods 168 (1980) 1.
71. P.F.A. Alkemade, W.C. Turkenburg and W.F. van der Weg, Nucl. Instrum. Methods B 28 (1987) 161.
72. H.H. Andersen and J.F. Ziegler, Hydrogen Stopping Powers and Ranges in All Elements, in: The Stopping and Ranges of Ions in Matter, Ed. J.F. Ziegler (Pergamon, New York, 1977).
73. H. Ibach, H. Wagner and D. Bruchmann, Solid State Commun. 42 (1982) 457.
74. Y.J. Chabal, Phys. Rev. B 29 (1984) 3677.
75. H. Bu and J.W. Rabalais, Surf. Sci. 301 (1994) 285.
76. M. Morita, T. Ohmi, E. Hasegawa, M. Kawakami and K. Suma, Appl. Phys. Lett. 55 (1989) 562.
77. J. Westermann, H. Nienhaus and W. Mönch, Surf. Sci. 311 (1994) 101.
78. A. Stockhausen, T.U. Kampen and W. Mönch, Appl. Surf. Sci. 56-58 (1992) 795.
79. U. Neuwald, U. Memmert and R.J. Behm, in: Proceedings of the 41st American Vacuum Society Symposium (AVS, Denver, 1994) p. 177.
80. N. Cabrera and N.F. Mott, Rept. Prog. Phys. 12 (1948) 148.
81. A. Atkinson, Rev. Mod. Phys. 57 (1985) 437.
82. G.F. Cerofolini, G. LaBruna and L. Meda, Appl. Surf. Sci. 89 (1995) 361.
83. Y. Kobayashi, K. Prabhakaran and T. Ogino, Surf. Sci. 329 (1995) 167.
84. S.M. Gray, M.K.J. Johansson and L.S.O. Johansson, in: Proceedings of the Fifth International Conference on the Formation of Semiconductor Interfaces (Princeton, USA, 1995).