Evaluation of poly(hydroxyethyl methacrylate) imaging chemistries for micropatterning applications

Journal of Materials Chemistry

Volumn 14, Issue 22, 2004, Pages 3312-3320

  Vasilopoulou, M ^a   Boyatzis, S ^b   Raptis, I ^a   Dimotikalli, D ^c   Argitis, P ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b INSTITUTE OF NANOSCIENCE AND NANOTECHNOLOGY   (Greece)

^c NATIONAL TECHNICAL UNIVERSITY OF ATHENS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMATERIALS; CROSSLINKING; ESTERIFICATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; OPTICAL RESOLVING POWER; REACTION KINETICS; SOLUTIONS; ULTRAVIOLET RADIATION; ULTRAVIOLET SPECTROSCOPY;

CHAIN SCISSION MECHANISM; ELECTRON BEAM RADIATION; MICROPATTERNING; PHOTO-ACID GENERATORS;

ACRYLIC MONOMERS;

BIOMATERIAL; POLYMACON;

AQUEOUS SOLUTION; ARTICLE; CHEMICAL REACTION; CHEMICAL STRUCTURE; CROSS LINKING; ELECTRON BEAM; IMAGING SYSTEM; INFRARED SPECTROSCOPY; REACTION ANALYSIS; SENSITIVITY ANALYSIS; TRANSESTERIFICATION; ULTRAVIOLET RADIATION; ULTRAVIOLET SPECTROSCOPY;

EID: 9644260573     PISSN: 09599428     EISSN: None     Source Type: Journal    
DOI: 10.1039/b407485h     Document Type: Article

References (57)

1. G. M. Wallraff and W. D. Hinsberg, Chem. Rev., 1999, 99, 1801.
2. Y. Xia, J. A. Rogers, K. E. Paul and G. M. Whitesides, Chem. Rev., 1999, 99, 1823.
3. R. R. Kunz, T. M. Bloomstein, D. E. Hardy, R. B. Goodman, D. K. Downs and J. E. Curtin, J. Vac. Sci. Technol., B, 1998, 17(6), 3267.
4. N. N. Matsuzawa, H. Oizumi, S. Mori, S. Irie, S. Shirayone, E. Yano, S. Okazaki, A. Ishitani and D. A. Dixon, Jpn. J. Appl. Phys., 1999, 38, 7109.
5. I. Haller, M. Hatzakis and R. Srinivasan, IBM J. Res. Dev., 1968. 12, 251.
6. M. Hatzakis, IBM J. Res. Dev., 1988, 32, 441.
7. D. L. Spears and H. I. Smith, Solid State Technol., 1972, 15(7), 21.
8. B. J. Lin, J. Vac. Sci. Technol., A, 1975, 12, 1317.
9. H. Ito, Proc. SPIE - Int. Soc. Opt. Eng., 1999, 3678, 2.
10. E. Reichmanis, O. Nalamasu and F. M. Houlihan, Acc. Chem. Res., 1999, 32, 659.
11. G. M. Wallraff, R. D. Allen, W. D. Hinsberg, C. F. Larson, R. D. Johnson, R. DiPietro, G. Breyta, N. Hacker and R. R. Kunz, J. Vac. Sci. Technol., B, 1993, 11, 2783.
12. R. D. Allen, G. M. Wallraff, W. D. Hinsberg, W. E. Conley and R. R. Kunz, Solid State Technol., 1993, 53.
13. R. R. Kunz, R. D. Allen, W. D. Hinsberg and G. M. Wallraff, Proc. SPIE - Int. Soc. Opt. Eng., 1999, 1925, 167.
14. H. Tada, T. Iwai and T. Nakayama, Proc. SPIE - Int. Soc. Opt. Eng., 1999, 3678, 676.
15. A. G. Timko, F. M. Houlihan, R. A. Cirelli, O. Nalamasu, H. Yoshino, T. Itani, H. Tanabe and K. Kasama, J. Vac. Sci. Technol., B, 1999, 17, 101.
16. M. Sasago, Y. Tani, M. Endo and N. Nomura, Proc. SPIE - Int. Soc. Opt. Eng., 1990, 1264, 466.
17. Y. Ozaki, Y. Kawai and A. Yoshikawa, Jpn. J. Appl. Phys., 1990, 29, 2553.
18. W. Chen and H. Ahmed, Appl. Phys. Lett, 1993, 62, 1499.
19. K. E. Gonsalves, L. Merhari, H. Wu and Y. Hu, Adv. Mater., 2001, 13, 703.
20. K. Maeda, K. Nakano, S. Iwasa and E. Hasegawa, Jpn. J. Appl. Phys., 2001, 40, 7162.
21. H. Yoshino, T. Itani, M. Takimoto and H. Tanabe, Jpn. J. Appl. Phys., 1999, 38, 7099.
22. M. Padmanaban, J. B. Bae, W. K. Kim, T. Kudo, M. D. Rahmen and R. R. Dammel, J. Photopolym. Sci. Technol., 2000, 13, 607.
23. K. Diakoumakos, I. Raptis, A. Tserepi and P. Argitis, Polymer, 2002, 43, 1103.
24. J. Lee, T. Aoai, S. Kondo, N. Miyakawa, N. Takahara and T. Yamaoka, J. Polym. Sci., Part A: Polym. Chem., 2002, 40, 1858.
25. A. Aviram, M. Angelopoulos, E. Babich, I. Babich, K. Petrilo and D. Seeger, Proc. SPIE - Int. Soc. Opt. Eng., 1998, 3331, 349.
26. K. Senshu, S. Yamashita, H. Mori, M. Ito, A. Hirao and S. Nakahama, Langmuir, 1999, 15, 1754.
27. C. S. Kwok, P. D. Mourad, L. A. Crum and B. D. Ratner, Biomacromolecules, 2000, 1, 139.
28. L-T Ng, J. T. Guthrie and Y. J. Yuan, Polym. Int., 2000, 49, 1017.
29. Y. Luo, P. D. Dalton and M. S. Shoichet, Chem. Mater., 2001, 13, 4087.
30. W. Huang, J. Kim, M. L. Bruening and G. L. Baker, Macromolecules, 2002, 35, 1175.
31. K. Kataoka, Y. Sakurai, T. Hanai, A. Maruyama and T. Tsuruta, Biomaterials, 1988, 9, 218.
32. N. A. Peppas, Hydrogels in medicine and pharmacy in 'Polymers', vol. 2, CRC Press, Boca Raton, FL, 1986.
33. B. D. Ratner and A. S. Hoffman, Hydrogels for Medical and Related Applications, ACS Symposium Series, American Chemical Society, Washington DC, 1976.
34. T. K. L. Meyvis, S. C. De Smedt, J. Demeester and W. E. Hennink, Macromolecules, 2000, 33, 4717.
35. N. A. Peppas and W. H. M. Yang, Contact Intraocul. Lens Med. J., 1981, 7, 300.
36. T. A. Horbett, Advances in Biomaterials, John Wiley and Sons, Chichester, England, 1982.
37. P. G. Lopez, D. B. Rather, J. R. Rapoza and A. T. Horbett, Macromolecules, 1993, 26, 3247.
38. Y. M. Sun and H. L. Lee, Polymer, 1996, 37(17), 3915.
39. A. Denizli, M. Kiremitci and E. Piskin, Biomaterials, 1988, 9, 363.
40. J. Mokry, J. Karbanova, J. Lukas, V. Paleckova and B. Dvorankova, Biotechnol. Prog., 2000, 16, 897.
41. G. P. Lopez, B. D. Ratner, R. J. Rapoza and T. A. Horbett, Macromolecules, 1993, 26(13), 3247.
42. M. Tanaka, A. Mochizuki, N. Ishii, T. Motomura and T. Hatakeyama, Biomacromolecules, 2001, 3, 36.
43. B. Suthar, K. Jadav and M. Dave, J. Appl. Polym. Sci., 1994, 54, 1127.
44. C. W. Huang, Y. M. Sun and W. F. Huang, J. Polym. Sci., Part A: Polym. Chem., 1997, 35, 1873.
45. A. Douvas, P. Argitis, C. D. Diakoumakos, K. Misiakos, D. Dimotikali and S. E. Kakabakos, J. Vac. Sci. Technol., B, 2001, 19(6), 2820.
46. A. Douvas, P. Argitis, K. Misiakos, D. Dimotikali, P. S. Petrou and S. E. Kakabakos, Biosens. Bioelectron., 2002, 17, 269.
47. D. F. Stamatialis, M. Sanopoulou and I. Raptis, J. Appl. Polym. Sci., 2002, 83, 2823.
48. W. Moreau, Semiconductor Lithography, Plenum Press, New York, 1988, p. 59.
49. N. J. Turro, Modern Molecular Photochemistry, The Benjamin/Cummings Co. Inc., California, 1978, p. 224.
50. (a) M. Hatzakis, IBM J. Res. Dev., 1988, 32(4);
51. (b) A. Olzierski and I. Raptis, Microelectron. Eng., 2004, 73-74, 244-251.
52. (a) J. J. Boon, Int. J. Mass Spectrom. Ion Processes, 1992, 118-119, 755-787;
53. (b) G. A. van der Doelen and J. J. Boon, J. Photochem. Photobiol., A, 2000, 134, 45-57;
54. (c) B. P. Tage and H. R. Schulten, Macromolecules, 1988, 21, 2018.
55. J. P. Everett, D. L. Schmidt, G. D. Rose, P. Argitis, C. J. Aidinis and M. Hatzakis, Polymer, 1997, 38(7), 1719.
56. I. Raptis, D. Velessiotis, M. Vasilopoulou and P. Argitis, Microelectron. Eng., 2000, 53, 489.
57. A. E. Novembre, L. M. Masakowski and M. A. Hartney, Polym. Eng. Sci., 1986, 26(16), 1158.