-
1
-
-
26844495689
-
-
Monterey, CA, April
-
K. Early, D. M. Tennant, D. Jeon, P. P. Mulgrew, A. A. MacDowell, O. R. Wood II, G. D. Kubiak, and D. A. Tichenor, Soft-X-Ray Lithography Conference, Monterey, CA, April 1992.
-
(1992)
Soft-X-Ray Lithography Conference
-
-
Early, K.1
Tennant, D.M.2
Jeon, D.3
Mulgrew, P.P.4
MacDowell, A.A.5
Wood II, O.R.6
Kubiak, G.D.7
Tichenor, D.A.8
-
3
-
-
0000760482
-
-
S. W. J. Kuan, C. W. Frank, C. C. Fu, D. R. Allee, P. Maccagno, and R. F. W. Pease, J. Vac. Sci. Technol. B 6, 2274 (1988).
-
(1988)
J. Vac. Sci. Technol. B
, vol.6
, pp. 2274
-
-
Kuan, S.W.J.1
Frank, C.W.2
Fu, C.C.3
Allee, D.R.4
Maccagno, P.5
Pease, R.F.W.6
-
6
-
-
0002987606
-
-
J. J. Pireaux, J. Riga, R. Caudano, and J. Verbist, in Photon, Electron, and Ion Probes, pp. 169-201.
-
Photon, Electron, and Ion Probes
, pp. 169-201
-
-
Pireaux, J.J.1
Riga, J.2
Caudano, R.3
Verbist, J.4
-
9
-
-
4143150811
-
-
T. M. Bloomstein, M. W. Horn, M. Rothschild, R. R. Kunz, S. T. Palmacci, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997);
-
(1997)
J. Vac. Sci. Technol. B
, vol.15
, pp. 2112
-
-
Bloomstein, T.M.1
Horn, M.W.2
Rothschild, M.3
Kunz, R.R.4
Palmacci, S.T.5
Goodman, R.B.6
-
10
-
-
11744307460
-
-
T. M. Bloomstein, M. Rothschild, R. R. Kunz, D. E. Hardy, R. B. Goodman, and S. T. Palmacci, J. Vac. Sci. Technol. B, ibid. 16, 3154 (1998).
-
(1998)
J. Vac. Sci. Technol. B
, vol.16
, pp. 3154
-
-
Bloomstein, T.M.1
Rothschild, M.2
Kunz, R.R.3
Hardy, D.E.4
Goodman, R.B.5
Palmacci, S.T.6
-
12
-
-
0003469457
-
-
Wiley, New York
-
B. Ranby and J. F. Rabek, Photodegradation, Photo-oxidation, and Photostabilization of Polymers: Principles and Applications (Wiley, New York, 1975).
-
(1975)
Photodegradation, Photo-oxidation, and Photostabilization of Polymers: Principles and Applications
-
-
Ranby, B.1
Rabek, J.F.2
-
13
-
-
85015541039
-
-
M. Sakata, T. Ito, M. Kosuge, and Y. Yamashita, J. Photopolym. Sci. Technol. 5, 181 (1991).
-
(1991)
J. Photopolym. Sci. Technol.
, vol.5
, pp. 181
-
-
Sakata, M.1
Ito, T.2
Kosuge, M.3
Yamashita, Y.4
-
14
-
-
0026256248
-
-
M. Sakata, T. Ito, and Y. Yamashita, Jpn. J. Appl. Phys., Part 1 30, 3116 (1991).
-
(1991)
Jpn. J. Appl. Phys., Part 1
, vol.30
, pp. 3116
-
-
Sakata, M.1
Ito, T.2
Yamashita, Y.3
-
15
-
-
0002053947
-
-
H. Namatsu, Y. Takahashi, K. Yamazaki, T. Yamaguchi, M. Nagase, and K. Kurihara, J. Vac. Sci. Technol. B 16, 69 (1998).
-
(1998)
J. Vac. Sci. Technol. B
, vol.16
, pp. 69
-
-
Namatsu, H.1
Takahashi, Y.2
Yamazaki, K.3
Yamaguchi, T.4
Nagase, M.5
Kurihara, K.6
-
16
-
-
0000582196
-
-
R. Sooriyakumaran, G. M. Wallraff, C. E. Larson, D. Fenzel-Alexander, R. A. DiPietro, J. Opitz, D. C. Hofer, D. C. LaTulipe, J. P. Simons, Q. Lin, and A. D. Katnani, Proc. SPIE 3333, 219 (1998).
-
(1998)
Proc. SPIE
, vol.3333
, pp. 219
-
-
Sooriyakumaran, R.1
Wallraff, G.M.2
Larson, C.E.3
Fenzel-Alexander, D.4
Dipietro, R.A.5
Opitz, J.6
Hofer, D.C.7
LaTulipe, D.C.8
Simons, J.P.9
Lin, Q.10
Katnani, A.D.11
-
17
-
-
0029765947
-
-
U. Schaedeli, E. Tinguely. A. J. Blakeney, P. Falcigno, and R. R. Kunz, Proc. SPIE 2724, 344 (1996).
-
(1996)
Proc. SPIE
, vol.2724
, pp. 344
-
-
Schaedeli, U.1
Tinguely, E.2
Blakeney, A.J.3
Falcigno, P.4
Kunz, R.R.5
-
18
-
-
0003170730
-
-
M. A. Hartney, R. R. Kunz, D. J. Ehrlich, and D. C. Shaver, Proc. SPIE 1262, 119 (1991).
-
(1991)
Proc. SPIE
, vol.1262
, pp. 119
-
-
Hartney, M.A.1
Kunz, R.R.2
Ehrlich, D.J.3
Shaver, D.C.4
-
19
-
-
0032401486
-
-
C. C. Henderson, D. R. Wheeler, T. P. Pollagi, D. J. O'Connell, J. E. M. Goldsmith, A. Fisher, and G. F. Cardinale, Proc. SPIE 3331, 32 (1998).
-
(1998)
Proc. SPIE
, vol.3331
, pp. 32
-
-
Henderson, C.C.1
Wheeler, D.R.2
Pollagi, T.P.3
O'Connell, D.J.4
Goldsmith, J.E.M.5
Fisher, A.6
Cardinale, G.F.7
-
20
-
-
33745617811
-
-
S. C. Palmateer, S. G. Cann, J. E. Curtin, S. P. Doran, L. M. Eriksen, A. R. Forte, R. R. Kunz, T. M. Lyszczarz, and M. B. Stern, Proc. SPIE 3333, 634 (1998).
-
(1998)
Proc. SPIE
, vol.3333
, pp. 634
-
-
Palmateer, S.C.1
Cann, S.G.2
Curtin, J.E.3
Doran, S.P.4
Eriksen, L.M.5
Forte, A.R.6
Kunz, R.R.7
Lyszczarz, T.M.8
Stern, M.B.9
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