Conformai doping of FINFETs: A fabrication and metrology challenge

AIP Conference Proceedings

Volumn 1066, Issue , 2008, Pages 449-456

  Vandervorst, W ^a,b   Everaert, J L ^a   Rosseel, E ^a   Jurczak, M ^a   Hoffman, T ^a   Eyben, P ^a   Mody, J ^a,b   Zschatzsch G ^a,b   Koelling, S ^a,b   Gilbert, M ^a   Poon, T ^c   Del Agua Borniquel, J ^c   Foad, M ^c   Duffy, R ^d   Pawlak, B J ^d  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c APPLIED MATERIALS INC   (United States)

^d NXP TSMC Research Center   (Belgium)

Author keywords

Conformai doping; Finfet; Ion implantation; Plasma doping; SSRM

Indexed keywords

EID: 85014431411     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3033660     Document Type: Conference Paper

References (30)

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