Analyzing Si-based structures in 3D with a laser-pulsed local electrode atom probe

Solid State Technology

Volumn 49, Issue 6, 2006, Pages 65-72

  Thompson, K ^a   Larson, D J ^a   Ulfig, R M ^a   Bunton, J H ^a   Kelly, T F ^a  

^a Imago Scientific Instruments   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LOCAL ELECTRODE ATOM PROBE (LEAP); METROLOGY TOOL; NEEDLE-SHAPED SPECIMEN; SEMICONDUCTOR TECHNOLOGY;

ELECTRODES; LASER PULSES; MULTILAYERS; SEMICONDUCTOR DEVICES; SILICON;

NANOTECHNOLOGY;

EID: 33745968409     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Review

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