SCOPUS 정보 검색 플랫폼

Volumn 26, Issue 1, 2008, Pages 396-401

Probing doping conformality in fin shaped field effect transistor structures using resistors

a IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DOPING CONFORMALITY; FIN SHAPED FIELD EFFECT TRANSISTOR (FINFET);

DOPING (ADDITIVES); MOS DEVICES; RESISTORS; VOLTAGE CONTROL;

FIELD EFFECT TRANSISTORS;

EID: 38849086817 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2789439 Document Type: Article

Times cited : (17)

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