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Surface and Coatings Technology

Volumn 156, Issue 1-3, 2002, Pages 3-12

From plasma immersion ion implantation to deposition: A historical perspective on principles and trends

(1) Anders, André a

a UNIVERSITY OF CALIFORNIA (United States)

Author keywords

Plasma immersion ion implantation and deposition; Review

Indexed keywords

DEPOSITION; ION IMPLANTATION; PLASMA APPLICATIONS;

PLASMA IMMERSION;

COATING TECHNIQUES;

PLASMA TREATMENT;

DRY DEPOSITION; FILM; PLASMA (IONIZED GAS); PLASMA IMMERSION ION IMPLANTATION METHOD; SURFACE PROPERTY; TECHNOLOGY;

EID: 0036642150 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(02)00066-X Document Type: Article

Times cited : (85)

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