SCOPUS 정보 검색 플랫폼

Scanning Probe Microscopy

Volumn 2, Issue , 2007, Pages 31-87

Probing semiconductor technology and devices with scanning spreading resistance microscopy

(5) Eyben, P a Vandervorst, W a Alvarez, D b Xu, M a Fouchier, M c

a Kapeldreef 75 (Belgium)

b INFINEON TECHNOLOGIES (United States)

c Veeco Instruments (France)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICE MANUFACTURE;

CHANNEL LENGTH; CMOS TECHNOLOGY; LATERAL POSITIONS; PRECISE LOCATIONS; SCANNING SPREADING RESISTANCE MICROSCOPY; SEMICONDUCTOR INDUSTRY; SEMICONDUCTOR TECHNOLOGY; TWO-DIMENSION;

SEMICONDUCTOR DEVICES;

EID: 84891388855 PISSN: None EISSN: None Source Type: Book
DOI: 10.1007/978-0-387-28668-6_3 Document Type: Chapter

Times cited : (67)

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