Analysis of nickel silicides by SIMS and LEAP

AIP Conference Proceedings

Volumn 931, Issue , 2007, Pages 129-136

  Ronsheim, Paul ^a   McMurray, Jeff ^a   Flaitz, Philip ^a   Parks, Christopher ^a   Thompson, Keith ^b   Larson, David ^b   Kelly, Thomas F ^b  

^a IBM   (United States)

^b Imago Scientific Instruments   (United States)

Author keywords

APT; Atom probe; LEAP; NiSi; Silicide; SIMS; Tomography

Indexed keywords

EID: 35348907305     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2799356     Document Type: Conference Paper

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