Versatile control of metal-assisted chemical etching for vertical silicon microwire arrays and their photovoltaic applications

Scientific Reports

Volumn 5, Issue , 2015, Pages

  Um, Han Don ^a   Kim, Namwoo ^a   Lee, Kangmin ^a   Hwang, Inchan ^a   Hoon Seo, Ji ^a   Yu, Young J ^b   Duane, Peter ^b   Wober, Munib ^b   Seo, Kwanyong ^a  

^a Ulsan National Institute of Science and Technology   (South Korea)

^b Zena Technologies   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84931275703     PISSN: None     EISSN: 20452322     Source Type: Journal    
DOI: 10.1038/srep11277     Document Type: Article

References (53)

1. Kayes, B. M., Atwater, H. A. & Lewis, N. S. Comparison of the device physics principles of planar and radial p-n junction nanorod solar cells. J. Appl. Phys. 97, 114302 (2005).
2. Kayes, B. M. et al. Radial PN junction, wire array solar cells. in Proc. 33rd IEEE PVSC 1-5 (San Diego, USA, 2008).
3. Kelzenberg, M. D. et al. Enhanced absorption and carrier collection in Si wire arrays for photovoltaic applications. Nat Mater 9, 239-244 (2010).
4. Kim, D. R., Lee, C. H., Weisse, J. M., Cho, I. S. & Zheng, X. Shrinking and growing: Grain boundary density reduction for efficient polysilicon thin-film solar cells. Nano Lett. 12, 6485-6491 (2012).
5. Gharghi, M., Fathi, E., Kante, B., Sivoththaman, S. & Zhang, X. Heterojunction silicon microwire solar cells. Nano Lett. 12, 6278-6282 (2012).
6. Shin, J. C. et al. Experimental study of design parameters in silicon micropillar array solar cells produced by soft lithography and metal-assisted chemical etching. IEEE J. Photovolt. 2, 129-133 (2012).
7. Lee, E. et al. Comparative experimental and simulative investigations of radial p-n junction Si microwire array solar cells. Sol. Energy Mater. Sol. Cells 103, 93-97 (2012).
8. Turner-Evans, D. B., Emmer, H., Chen, C. T. & Atwater, H. A. Flexible, transparent contacts for inorganic nanostructures and thin films. Adv. Mater. 25, 4018-4022 (2013).
9. Turner-Evans, D. B., Chen, C. T., Emmer, H., McMahon, W. E. & Atwater, H. A. Optoelectronic analysis of multijunction wire array solar cells. J. Appl. Phys. 114, 014501 (2013).
10. Seo, K. et al. Si microwire solar cells: Improved efficiency with a conformal SiO2 Layer. ACS Nano 7, 5539-5545 (2013).
11. Yoon, H. P. et al. Enhanced conversion efficiencies for pillar array solar cells fabricated from crystalline silicon with short minority carrier diffusion lengths. Appl. Phys. Lett. 96, 213503 (2010).
12. Kim, D. R., Lee, C. H., Rao, P. M., Cho, I. S. & Zheng, X. Hybrid Si microwire and planar solar cells: Passivation and characterization. Nano Lett. 11, 2704-2708 (2011).
13. Jung, J. Y. et al. A waferscale Si wire solar cell using radial and bulk p-n junctions. Nanotechnology 21, 445303 (2010).
14. Kelzenberg, M. D. et al. High-performance Si microwire photovoltaics. Energy Environ. Sci. 4, 866-871 (2011).
15. Park, K.-T. et al. Optical properties of Si microwires combined with nanoneedles for flexible thin film photovoltaics. Opt. Express 19, A41-A50 (2011).
16. Aachboun, S. & Ranson, P. Deep anisotropic etching of silicon. J. Vac. Sci. Technol. A 17, 2270-2273 (1999).
17. Kok, K. W., Yoo, W. J., Sooriakumar, K., Pan, J. S. & Lee, E. Y. Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems. J. Vac. Sci. Technol. B 20, 1878 (2002).
18. Ranganathan, N., Prasad, K., Balasubramanian, N. & Pey, K. L. A study of thermo-mechanical stress and its impact on throughsilicon vias. J. Micromech. Microeng. 18, 075018 (2008).
19. Chung, C. K. Geometrical pattern effect on silicon deep etching by an inductively coupled plasma system. J. Micromech. Microeng. 14, 656 (2004).
20. Liu, X. et al. Black silicon: Fabrication methods, properties and solar energy applications. Energy Environ. Sci. 7, 3223-3263 (2014).
21. Schaefer, S. & Ludemann, R. Low damage reactive ion etching for photovoltaic applications. J. Vac. Sci. Technol. A 17, 749 (1999).
22. Zaidi, S. H., Ruby, D. S. & Gee, J. M. Characterization of random reactive ion etched-textured silicon solar cells. IEEE Trans. Electron Devices 48, 1200-1206 (2001).
23. Chen, T.-G. et al. Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics. Prog. Photovoltaics 22, 452-461 (2014).
24. Hildreth, O. J. & Schmidt, D. R. Vapor phase metal-assisted chemical etching of silicon. Adv. Funct. Mater. 24, 3827-3833 (2014).
25. Hu, Y. et al. Continuous-flow mass production of silicon nanowires via substrate-enhanced metal-catalyzed electroless etching of silicon with dissolved oxygen as an oxidant. Sci Rep 4, 3667 (2014).
26. Huang, Z. P., Geyer, N., Werner, P., de Boor, J. & Gosele, U. Metal-assisted chemical etching of silicon: A review. Adv. Mater. 23, 285-308 (2011).
27. Hung, Y.-J., Lee, S.-L., Wu, K.-C., Tai, Y. & Pan, Y.-T. Antireflective silicon surface with vertical-aligned silicon nanowires realized by simple wet chemical etching processes. Opt. Express 19, 15792-15802 (2011).
28. Liu, L., Peng, K. Q., Hu, Y., Wu, X. L. & Lee, S. T. Fabrication of silicon nanowire arrays by macroscopic galvanic cell-driven metal catalyzed electroless etching in aerated HF solution. Adv. Mater. 26, 1410-1413 (2014).
29. Peng, K. Q. et al. Fabrication of single-crystalline silicon nanowires by scratching a silicon surface with catalytic metal particles. Adv. Funct. Mater. 16, 387-394 (2006).
30. Peng, K. Q., Yan, Y. J., Gao, S. P. & Zhu, J. Synthesis of large-area silicon nanowire arrays via self-assembling nanoelectrochemistry. Adv. Mater. 14, 1164-1167 (2002).
31. Schmitt, S. W. et al. Nanowire arrays in multicrystalline silicon thin films on glass: A promising material for research and applications in nanotechnology. Nano Lett. 12, 4050-4054 (2012).
32. Srivastava, S. K. et al. Large area fabrication of vertical silicon nanowire arrays by silver-assisted single-step chemical etching and their formation kinetics. Nanotechnology 25, 175601 (2014).
33. Chang, S. W., Chuang, V. P., Boles, S. T., Ross, C. A. & Thompson, C. V. Densely packed arrays of ultra-high-aspect-ratio silicon nanowires fabricated using block-copolymer lithography and metal-assisted etching. Adv. Funct. Mater. 19, 2495-2500 (2009).
34. Dawood, M. K. et al. Interference lithographically defined and catalytically etched, large-area silicon nanocones from nanowires. Nanotechnology 21, 205305 (2010).
35. Boor, J. D., Geyer, N., Wittemann, J. V., Gosele, U. & Schmidt, V. Sub-100 nm silicon nanowires by laser interference lithography and metal-assisted etching. Nanotechnology 21, 095302 (2010).
36. Huang, J. Q., Chiam, S. Y., Tan, H. H., Wang, S. J. & Chim, W. K. Fabrication of silicon nanowires with precise diameter control using metal nanodot arrays as a hard mask blocking material in chemical etching. Chem. Mater. 22, 4111-4116 (2010).
37. Choi, H.-J. et al. Optimization of metal-assisted chemical etching process in fabrication of p-type silicon wire arrays. Curr. Appl. Phys. 11, S25-S29 (2011).
38. Zahedinejad, M. et al. Deep and vertical silicon bulk micromachining using metal assisted chemical etching. J. Micromech. Microeng. 23, 055015 (2013).
39. Lee, M. H. & Khang, D. Y. Facile generation of surface structures having opposite tone in metal-assisted chemical etching of Si: Pillars vs. holes. RSC Adv. 3, 26313-26320 (2013).
40. Kim, S. M. & Khang, D. Y. Bulk micromachining of Si by metal-assisted chemical etching. Small 10, 3761-3766 (2014).
41. Peng, K. et al. Uniform, axial-orientation alignment of one-dimensional single-crystal silicon nanostructure arrays. Angew. Chem.-Int. Edit. 44, 2737-2742 (2005).
42. Zhang, M.-L. et al. Preparation of large-area uniform silicon nanowires arrays through metal-assisted chemical etching. J. Phys. Chem. C 112, 4444-4450 (2008).
43. Fang, H., Wu, Y., Zhao, J. H. & Zhu, J. Silver catalysis in the fabrication of silicon nanowire arrays. Nanotechnology 17, 3768 (2006).
44. Kim, J. et al. Au/Ag bilayered metal mesh as a Si etching catalyst for controlled fabrication of Si nanowires. ACS Nano 5, 3222-3229 (2011).
45. Cheng, S. L., Chung, C. H. & Lee, H. C. A study of the synthesis, characterization, and kinetics of vertical silicon nanowire arrays on (001) Si substrates. J. Electrochem. Soc. 155, D711-D714 (2008).
46. Laidler, K. J. Chemical kinetics. (New York: Harper and Row, 1987).
47. Pilling, M. J. & Seakins, P. W. Reaction kinetics. (London: Oxford University Press, 1996).
48. Atkins, P. & Jones, L. Chemical principles. (New York: W.H. Freeman, 2001).
49. Freeman, D. L. & Doll, J. D. The influence of diffusion on surface-reaction kinetics. J. Chem. Phys. 78, 6002 (1983).
50. Connors, K. A. Chemical kinetics: The study of reaction rates in solution. (John Wiley & Sons, 1990).
51. Smith, G. B., Niklasson, G. A., Svensson, J. S. E. M. & Granqvist, C. G. Noble-metal-based transparent infrared reflectors: Experiments and theoretical analyses for very thin gold films. J. Appl. Phys. 59, 571 (1986).
52. Smith, D. Thin-film deposition: Principles and practice. (McGraw Hill Professional, 1995).
53. Bordo, K. & Rubahn, H. G. Effect of deposition rate on structure and surface morphology of thin evaporated Al films on dielectrics and semiconductors. Mater. Sci.-Medzg. 18, 313-317 (2012).