Vapor phase metal-assisted chemical etching of silicon

Advanced Functional Materials

Volumn 24, Issue 24, 2014, Pages 3827-3833

  Hildreth, Owen J ^a   Schmidt, Daniel R ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

chemical etching; electroless; metal assisted chemical etching; nanofabrication; silicon; vapor phase

Indexed keywords

CATALYSTS; LIQUIDS; MEMS; METALS; NANOTECHNOLOGY; SILICON; VAPOR PHASE EPITAXY; VAPORS;

CHEMICAL ETCHING; ELECTROLESS; ETCH UNIFORMITY; METAL-ASSISTED CHEMICAL ETCHING; MICROPOROUS SILICON; SUBSTRATE TEMPERATURE; THREE-DIMENSIONAL STRUCTURE; VAPOR PHASE;

ETCHING;

EID: 84903144450     PISSN: 1616301X     EISSN: 16163028     Source Type: Journal    
DOI: 10.1002/adfm.201304129     Document Type: Article

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