Deep and vertical silicon bulk micromachining using metal assisted chemical etching

Journal of Micromechanics and Microengineering

Volumn 23, Issue 5, 2013, Pages

  Zahedinejad, Mohammad ^a   Farimani, Saeed Delaram ^a   Khaje, Mahdi ^a   Mehrara, Hamed ^a   Erfanian, Alireza ^a   Zeinali, Firooz ^a  

^a K N TOOSI UNIVERSITY OF TECHNOLOGY   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING TECHNIQUES; ETCHING PARAMETERS; METAL-ASSISTED CHEMICAL ETCHING; MICROMACHINED STRUCTURES; PHOTORESIST LAYERS; SIDEWALL ROUGHNESS; SILICON BULK MICROMACHINING; SUBSTRATE SURFACE;

ASPECT RATIO; DRY ETCHING; PHOTORESISTS; SILICON WAFERS; WET ETCHING;

MICROMACHINING;

EID: 84878094192     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/5/055015     Document Type: Article

References (18)

1. Burghartz J N 2001 Microelectron. Reliab. 41 13-9 (Pubitemid 32072141)
2. Weber K J, Blakers A W, Stocks M J, Babaei J H, Everett V A, Neuendorf A J and Verlinden P J 2004 IEEE Electron Device Lett. 25 37-9
3. Spatz J P 2005 Nature Mater. 4 115-6 (Pubitemid 40178706)
4. Petersen K 1996 Biomedical applications of MEMS Int. Electron Devices Meeting pp 239-42
5. Yazdi N, Ayazi F and Najafi K 1998 Proc. IEEE 86 1640-59
6. Ohji H, Izuo S, French P J and Tsutsumi K 2002 Sensors Actuators A 97 744-8 (Pubitemid 34758793)
7. Malekmohammad M, Soltanolkotabi M, Asadi R, Naderi M H, Erfanian A, Zahedinejad M, Bagheri S and Khaje M 2012 J. Micro/Nanolithogr. MEMS MOEMS 11 013011
8. Malekmohammad M, Soltanolkotabi M, Erfanian A, Asadi R, Bagheri S, Zahedinejad M, Khaje M and Naderi M H 2012 J. Eur. Opt. Soc. 7 12008
9. Kovacs G T A, Maluf N I and Petersen K E 1998 Proc. IEEE 86 1536-51
10. Chattopadhyay S, Li X and Bohn P W 2002 J. Appl. Phys. 91 6134 (Pubitemid 34562285)
11. Li X and Bohn P W 2000 Appl. Phys. Lett. 77 2572
12. Zahedinejad M, Khaje M, Erfanian A and Raissi F 2011 J. Micromech. Microeng. 21 065006
13. Zhang M L, Peng K Q, Fan X, Jie J S, Zhang R Q, Lee S T and Wong N B 2008 J. Phys. Chem. C 112 4444-50
14. Chang S W, Chuang V P, Boles S T, Ross C A and Thompson C V 2009 Adv. Funct. Mater. 19 2495-500
15. Balasundaram K et al 2012 Nanotechnology 23 305304
16. Dawood M K, Liew T H, Lianto P, Hong M H, Tripathy S, Thong J T L and Choi W K 2010 Nanotechnology 21 205305
17. de Boor J, Geyer N, Wittemann J V, Gösele U and Schmidt V 2010 Nanotechnology 21 095302
18. Huang J, Chiam S Y, Tan H H, Wang S and Chim W K 2010 Chem. Mater. 22 4111-6