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Volumn 10, Issue 18, 2014, Pages 3761-3766

Bulk micromachining of Si by metal-assisted chemical etching

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; COMPOSITE MICROMECHANICS; CRYSTAL ORIENTATION; ELECTROMECHANICAL DEVICES; ETCHING; MEMS; METALS; MICROMACHINING; SILVER;

EID: 84941095803     PISSN: 16136810     EISSN: 16136829     Source Type: Journal    
DOI: 10.1002/smll.201303379     Document Type: Article
Times cited : (58)

References (33)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.