Sub-100 nm silicon nanowires by laser interference lithography and metal-assisted etching

Nanotechnology

Volumn 21, Issue 9, 2010, Pages

  De Boor, Johannes ^a   Geyer, Nadine ^a   Wittemann, Jörg V ^a   Gösele, Ulrich ^a   Schmidt, Volker ^a  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

LASER INTERFERENCE LITHOGRAPHY; SILICON NANOWIRES; SINGLE-CRYSTALLINE; SQUARE PATTERNS; SUB-100 NM; THERMOELECTRIC DEVICES; UNIFORM DIAMETER; VERTICALLY ALIGNED; METAL ASSISTED ETCHINGS;

ETCHING; PHOTOLITHOGRAPHY; COST EFFECTIVENESS; SILICON;

NANOWIRES;

EID: 76249083606     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/9/095302     Document Type: Article

References (20)

1. Schmidt V, Riel H, Senz S, Karg S, Riess W and Gösele U 2006 Small 2 85-8
2. Shao M-W, Yao H, Zhang M-L, Wong N-B, Shan Y Y and Lee S-T 2005 Appl. Phys. Lett. 87 183106
3. Kelzenberg M D, Turner-Evans D B, Kayes B M, Filler M A, Putnam M C, Lewis N S and Atwater A H 2008 Nano Lett. 8 710-4
4. Hochbaum A I, Chen R, Delgado R D, Liang W, Garnett E C, Najarian M, Majumdar A and Yang P 2008 Nature 451 163-7
5. Boukai A I, Bunimovich Y, Tahir-Kheli J, Yu J-K, Goddard W A III and Heath J R 2008 Nature 451 168-71
6. Snyder G F and Toberer E S 2008 Nat. Mater. 7 105-14
7. Li X and Bohn P W 2000 Appl. Phys. Lett. 77 2572
8. Peng K, Hu J, Yan Y, Wu Y, Fang H, Xu Y, Lee S T and Zhu J 2006 Adv. Funct. Mater. 16 387-94
9. Peng K, Lu A, Zhang R and Lee S-T 2008 Adv. Funct. Mater. 18 3026-35
10. Peng K, Fang H, Hu J, Wu Y, Zhu J, Yan Y and Lee S-T 2006 Chem. Eur. J. 12 7942-7
11. Fang H, Wu Y, Zhao J and Zhu J 2006 Nanotechnology 17 3768-74
12. Huang Z, Fang H and Zhu J 2007 Adv. Mater. 19 744-8
13. Choi W K, Liew T H, Dawood M K, Smith H I, Thompson C V and Hong M H 2008 Nano Lett. 8 3799-802
14. Chen C G, Heilmann R K, Joo C, Konkola P T, Pati G S and Schattenburg M L 2002 J. Vac. Sci. Technol. B 20 3071-4
15. Moon J, Ford J and Yang S 2006 Polym. Adv. Technol. 17 83-93
16. Cui Y and Lieber C M 2001 Science 291 851-3
17. Huang L R, Cox E C, Austin R H and Sturm J C 2004 Science 304 987-90
18. Walsh M E 2004 PhD Thesis Massachusetts Institute of Technology
19. Chang S-W, Chuang V P, Boles S T, Ross C A and Thompson C V 2009 Adv. Funct. Mater. 19 2495-500
20. Geyer N, Huang Z, Fuhrmann B, Grimm S, Reiche M, Nguyen-Duc T-K, de Boor J, Leipner H S, Werner P and Gösele U 2009 Nano Lett. 9 3106-10