Discrete microfluidics based on aluminum nitride surface acoustic wave devices

Microfluidics and Nanofluidics

Volumn 18, Issue 4, 2015, Pages 537-548

  Zhou, J ^a,b,c   Pang, H F ^b,d   Garcia Gancedo, L ^e   Iborra, E ^f   Clement, M ^f   De Miguel Ramos, M ^f   Jin, H ^a   Luo, J K ^a   Smith, S ^c   Dong, S R ^a   Wang, D M ^a   Fu, Y Q ^b  

^a ZHEJIANG UNIVERSITY   (China)

^b UNIVERSITY OF THE WEST OF SCOTLAND   (United Kingdom)

^c UNIVERSITY OF EDINBURGH   (United Kingdom)

^d XI'AN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^e UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^f UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

AlN film; Microfluidic; SAW; Streaming; Surface acoustic wave

Indexed keywords

ACOUSTIC STREAMING; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ALUMINUM NITRIDE; DROPS; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; GUIDED ELECTROMAGNETIC WAVE PROPAGATION; III-V SEMICONDUCTORS; LITHIUM; MICROELECTRONICS; NIOBIUM COMPOUNDS; NITRIDES; OXIDE MINERALS; SAWING; SIGNAL PROCESSING; SUBSTRATES; TEXTURES; THIN FILMS;

ALN FILMS; ALUMINUM NITRIDE (ALN); BULK PIEZOELECTRIC MATERIAL; CONTROL AND SIGNAL PROCESSING; ELECTROMECHANICAL COUPLING COEFFICIENTS; MAGNETRON SPUTTERING SYSTEMS; OUT OF BAND REJECTION; SURFACE ACOUSTIC WAVES;

MICROFLUIDICS;

EID: 84925217843     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-014-1456-1     Document Type: Article

References (52)

1. Alghane M, Fu YQ, Chen BX, Li Y, Desmulliez MPY, Walton AJ (2011) Streaming phenomena in microdroplets induced by Rayleigh surface acoustic wave. J Appl Phys 109:114901
2. Bourquin Y, Reboud J, Wilson R, Cooper JM (2010) Tuneable surface acoustic waves for fluid and particle manipulations on disposable chips. Lab Chip 10:1898–1901
3. Bu G, Ciplys D, Shur M, Schowalter LJ (2004) Electromechanical coupling coefficient for surface acoustic waves in single-crystal bulk aluminum nitride. Appl Phys Lett 84:4611–4613
4. Cheng H, Sun Y, Zhang JX, Zhang YB, Yuan S, Hing P (2003) AlN films deposited under various nitrogen concentrations by RF reactive sputtering. J Cryst Growth 24:46–54
5. Chung GS, Phan DT (2010) Finite element modeling of surface acoustic waves in piezoelectric thin films. J Korean Phys Soc 57:446–450
6. Ding XY, Li P, Lin S-CS, Stratton ZS, Nama N, Guo F, Slotcavage D, Mao XL, Shi JJ, Costanzo F, Huang TJ (2013) Surface acoustic wave microfluidics. Lab Chip 13:3626–3649
7. Du XY, Fu YQ, Tan SC, Luo JK et al (2008) ZnO film thickness effect on surface acoustic wave modes and acoustic streaming. Appl Phys Lett 93:094105
8. Du XY, Fu YQ, Tan SC, Luo JK, Flewitt AJ, Lee DS, Maeng S, Kim SH, Choi YJ, Park NM, Park J, Milne WI (2009) Microfluidic pumps employing surface acoustic waves generated in ZnO thin films. J Appl Phys 105:024508
9. Franke T, Abate AR, Weitz DA, Wixforth A (2009) Surface acoustic wave (SAW) directed droplet flow in microfluidics for PDMS devices. Lab Chip 9:2625–2627
10. Franke T, Braunmuller S, Schmid L, Wixforth A, Weitz DA (2010) Surface acoustic wave actuated cell sorting. Lab Chip 10:789–794
11. Friend JR, Yeo LY (2011) Microscale acoustofluidics: microfluidics driven via acoustics and ultrasonics. Rev Mod Phys 83:647–704
12. Fu YQ, Luo JK, Du X, Flewitt AJ, Li Y, Walton A, Milne WI (2010a) Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review. Sens Actuat B 143:606–619
13. Fu YQ, Cherng JS, Luo J, Flewitt AJ, Walton AJ, Desmulliez M, Milne WI, Placido F (2010) Aluminium nitride thin film acoustic wave devices for Microfluidic and biosensing applications. In: Dissanayake DW (ed) Chapter 12, in acoustic waves. Rijeka, Croatia, Sciyo
14. Fu YQ, Li Y, Zhao C, Placido F, Walton AJ (2012a) Surface acoustic wave nebulization on nanocrystalline ZnO film. Appl Phys Lett 101:194101
15. Fu YQ, Garcia-Gancedo L, Pang HF, Porro S, Gu YW, Luo JK, Zu XT, Placido F, Wilson JIB, Flewitt AJ, Milne WI (2012b) Microfluidics based on ZnO/nanocrystalline diamond surface acoustic wave devices. Biomicrofluidics 6:02410
16. Garcia-Gancedo L, Pedros J, Zhao XB, Ashley GM, Flewitt AJ, Milne WI, Ford CJB, Lu JR, Luo JK (2012) Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading. Biosens Bioelectron 38:369–374
17. Guttenberg Z, Muller H, Habermuller H, Geisbauer A, Pipper J, Felbel J, Kielpinski M, Scriba J, Wixforth A (2005) Planar chip device for PCR and hybridization with surface acoustic wave pump. Lab Chip 5:308–317
18. 2 PCS-CDMA duplex incorporating thin film resonator technology. IEEE Ultrasonics Symposium, pp 1425–1428
19. Hou R, Hutson D, Kirk KJ, Fu YQ (2012) AlN thin film transducers for high temperature non-destructive testing applications. J Appl Phys 111:074510
20. Iriarte GF, Rodríguez JG, Calle F (2010) Synthesis of c-axis oriented AlN thin films on different substrates: a review. Mater Res Bull 45:1039–1045
21. Jin H, Zhou J, Dong SR, Feng B, Luo JK, Wang DM, Milne WI, Yang CY (2012) Deposition of c-axis orientation aluminum nitride films on flexible polymer substrates by reactive direct-current magnetron sputtering. Thin Solid Films 520:4863–4870
22. Jin H, Zhou J, He X, Wang W, Guo H, Dong S, Wang D, Xu Y, Geng J, Luo J, Milne WI (2013) Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications. Sci Rep 3:2140
23. Kim I, Ku D, Ko J, Kim D, Lee K, Jeong J-H, Lee T, Cheong B, Baik YJ, Kim W (2006) Improvement of the thermal and chemical stability of Al doped ZnO films. J Electroceramics 17:241–245
24. 3. Proc IEEE Ultrason Symp 1:435–438
25. Lee SH, Lee HJ, Oh D, Lee SW, Goto H, Buckmaster R, Yasukawa T, Tomokazu M, Soon-Ku H, Hyunchul K, Meoung-Whan C, Takafumi Y (2006) Control of the ZnO nanowires nucleation site using microfluidic channels. J Phys Chem B 110:3856–3859
26. Lee DS, Fu YQ, Maeng S, Du XY, Tan SC, Luo JK et al (2007) Integrated ZnO Surface acoustic wave microfluidic and biosensor system. IEEE international electron devices meeting, 10–12 Dec 2007, pp 851–854
27. Lewis MF (1972) New technique for the suppression of triple-transit signals in surface-acoustic-wave delay lines. Electron Lett 8:553–584
28. Li Y, Fu YQ, Brodie S, Mansuor A, Walton A (2012a) Enhanced microdroplet splitting, concentration, sensing and ejection by integration of electrowetting-on-dielectrics and surface acoustic wave. Biomicrofluidics 6:012812
29. Li Y, Fu YQ, Brodie SD, Alghane M, Walton AJ (2012b) Integrated microfluidics system using surface acoustic wave and electrowetting on dielectrics technology. Biomicrofluidics 6:012812
30. Özgür Ü, Alivov YaI, Liu C, Teke A, Reshchikov MA, Doğan S, Avrutin V, Cho S-J, Morkoç H (2005) A comprehensive review of ZnO materials and devices. J Appl Phys 98:041301
31. Pagán VR (2009) Aluminum nitride deposition/characterization and PMEMS/SAW device simulation/fabrication. Master thesis, West Virginia University
32. Pang HF, Fu YQ, Garcia-Gancedo L, Porro S, Luo JK, Placido F, Wilson JIB, Flewitt AJ, Milne WI, Zu XT (2013a) Enhancement of microfluidic efficiency with nanocrystalline diamond interlayer in the ZnO-based surface acoustic wave device. Microfluid Nanofluid 15(3):377–386
33. Pang HF, Garcia-Gancedo L, Fu YQ, Porro S, Gu YW, Luo JK, Zu XT, Placido F, Wilson JIB, Flewitt AJ, Milne WI (2013) Characterization of the surface acoustic wave devices based on ZnO/nanocrystalline diamond structures. Physica Status Solidi (a) 8:1575–1583
34. Reboud J, Bourquin Y, Wilson R, Pall GS, Jiwaji M, Pitt AR, Graham A, Waters AP, Coopera JM (2012) Shaping acoustic fields as a toolset for microfluidic manipulations in diagnostic technologies. PNAS 109:15162–15167
35. Shi J, Ahmed D, Mao X, Lin S-CS, Lawit A, Huang TJ (2009) Continuous particle separation in a microfluidic channel via standing surface acoustic waves (SSAW). Lab Chip 9:2890–2895
36. Shilton R, Tan MK, Yeo LY, Friend JR (2008) Particle concentration and mixing in microdrops driven by focused surface acoustic waves. J Appl Phys 104:014910
37. Smith WR, Gerard HM, Collins JH, Reeder TM, Shaw HJ (1969) Analysis of interdigital surface wave transducers by use of an equivalent circuit model. IEEE T Micro Theory 17(11):856–864
38. Tan MK, Friend JR, Yeo LY (2007) Microparticle collection and concentration via a miniature surface acoustic wave device. Lab Chip 7:618–625
39. Tan MK, Friend JR, Yeo LY (2009) Interfacial jetting phenomena induced by focused surface vibrations. Phys Rev Lett 103:024501
40. Trolier-Mckinstry S, Muralt P (2004) Thin film piezoelectrics for MEMS. J Electroceramics 12:7–17
41. Vanni L (2006) Aluminum nitride thin films for MEMS resonators: growth and characterization. Doctoral thesis, University of California, Santa Barbara
42. Wilson R, Reboud J, Bourquin Y, Neale SL, Zhang Y, Cooper JM (2011) Lab Chip. Phononic crystal structures for acoustically driven microfluidic manipulations 11:323–328
43. Wingqvist G (2010) AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications—a review. Surf Coat Technol 205:1279–1286
44. Wixforth A (2003) Acoustically driven planar microfluidics. Superlattices Microstruct 33:389–396
45. Wixforth A (2006) Acoustically driven programmable microfluidics for biological and chemical applications. JALA 11:399–405
46. Xu T, Wu G, Zhang G, Hao Y (2003) The compatibility of ZnO piezoelectric film with micromachining process. Sens Actuat A 104:61–67
47. Yeo LY, Friend JR (2009) Ultrafast microfluidics using surface acoustic waves. Biomicrofluidics 33:012002
48. Yeo LY, Friend JR (2013) Surface acoustic wave microfluidics, annual review of fluid mechanics. doi:10.1146/annurev-fluid-010313-141418
49. Zhou J, Xu N, Wang ZL (2006) Dissolving behavior and stability of ZnO in biofluidics: a study on biodegradability of ZnO nanostructures. Adv Mater 18:2432–2435
50. Zhou J, Dong SR, Jin H, Feng B, Wang D (2012) Flexible surface acoustic wave device with AlN film on polymer substrate. J Control Sci Eng 2012:1–5
51. Zhou J, He XL, Wang WB, Zhu Q, Xuan WP, Jin H, Dong SR, Wang DM, Luo JK (2013a) Transparent surface acoustic wave devices on ZnO/glass using Al-Doped ZnO as the electrode. IEEE Electron Device Lett 34:1319–1321
52. Zhou J, He XL, Jin H, Wang WB, Feng B, Dong SR, Wang DM, Zou GY, Luo JK (2013b) Crystalline structure effect on the performance of flexible ZnO/polyimide surface acoustic wave devices. J Appl Phys 114:044502