Crystalline structure effect on the performance of flexible ZnO/polyimide surface acoustic wave devices

Journal of Applied Physics

Volumn 114, Issue 4, 2013, Pages

  Zhou, Jian ^a   He, Xingli ^a   Jin, Hao ^a   Wang, Wenbo ^a   Feng, Bin ^a   Dong, Shurong ^a   Wang, Demiao ^a   Zou, Guangyi ^b   Luo, J K ^a,c  

^a ZHEJIANG UNIVERSITY   (China)

^b Hangzhou Silan Integrated Circuit Co   (China)

^c UNIVERSITY OF BOLTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COUPLING COEFFICIENT; CRYSTAL QUALITIES; CRYSTALLINE STRUCTURE; DEPOSITION CONDITIONS; DEPOSITION PRESSURES; DEVICE PERFORMANCE; FLEXIBLE SURFACES; LARGE GRAIN SIZES;

DEPOSITION; FILM THICKNESS; FLEXIBLE ELECTRONICS; METALLIC FILMS; NATURAL FREQUENCIES; SUPERCONDUCTING FILMS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 84882305938     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4816002     Document Type: Article

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