Electromechanical coupling coefficient for surface acoustic waves in single-crystal bulk aluminum nitride

Applied Physics Letters

Volumn 84, Issue 23, 2004, Pages 4611-4613

  Bu, G ^a   Ciplys, D ^a,d   Shur, M ^a   Schowalter, L J ^a,b   Schujman, S ^b   Gaska, R ^c  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b Crystal IS Inc   (United States)

^c SENSOR ELECTRONIC TECHNOLOGY INC   (United States)

^d VILNIUS UNIVERSITY   (Lithuania)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL COUPLING COEFFICIENTS; PIEZOELECTRIC CONSTANTS; PIEZOELECTRIC CRYSTALS;

ALUMINUM NITRIDE; BOUNDARY CONDITIONS; COMPUTER SIMULATION; MOLECULAR BEAM EPITAXY; PERMITTIVITY; RESONATORS; SENSORS; SINGLE CRYSTALS; SPUTTERING; WAVE FILTERS; WAVE PROPAGATION;

ACOUSTIC WAVES;

EID: 3042587716     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1755843     Document Type: Article

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