AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications - A review

Surface and Coatings Technology

Volumn 205, Issue 5, 2010, Pages 1279-1286

  Wingqvist, G ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

Biosensor; Electro acoustic device; Shear mode; Thin film technology

Indexed keywords

ALN; ALN THIN FILMS; AXIS INCLINATION; BIOSENSOR APPLICATIONS; DESIGN PARAMETERS; ELECTRICAL CIRCUIT; ELECTRO-ACOUSTIC DEVICES; FBAR STRUCTURES; LOW COSTS; LOW TEMPERATURES; QUARTZ CRYSTAL MICROBALANCE SENSORS; REACTIVE SPUTTERING PROCESS; SENSOR OPERATIONS; SHEAR MODES; SUBSTRATE WAFER; THIN FILM BULK ACOUSTIC RESONATOR; THIN FILM TECHNOLOGY; WURTZITES;

ACOUSTIC DEVICES; ACOUSTIC IMPEDANCE; ACOUSTIC RESONATORS; BIOSENSORS; FABRICATION; FILM GROWTH; QUARTZ; QUARTZ CRYSTAL MICROBALANCES; RESONATORS; THIN FILMS; VAPOR DEPOSITION; ZINC SULFIDE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 78649991052     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.08.109     Document Type: Article

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