Flexible surface acoustic wave device with AlN film on polymer substrate

Journal of Control Science and Engineering

Volumn 2012, Issue , 2012, Pages

  Zhou, Jian ^a   Dong, Shurong ^a   Jin, Hao ^a   Feng, Bing ^a   Wang, Demiao ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; ALN; ALN FILMS; DEPOSITION PRESSURES; FLEXIBLE SENSOR; FLEXIBLE SURFACES; LAB-ON-CHIP SYSTEMS; MICRO FLUIDIC APPLICATIONS; PIEZOELECTRIC THIN FILMS; POLYMER SUBSTRATE; ROOM TEMPERATURE; SIMULATED RESULTS; XRD;

ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM NITRIDE; POLYMER FILMS; POLYMERS; THIN FILMS; VAPOR DEPOSITION;

SUBSTRATES;

EID: 84867837907     PISSN: 16875249     EISSN: 16875257     Source Type: Journal    
DOI: 10.1155/2012/610160     Document Type: Article

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