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Volumn 15, Issue 3, 2013, Pages 377-386

Enhancement of microfluidic efficiency with nanocrystalline diamond interlayer in the ZnO-based surface acoustic wave device

Author keywords

Efficiency; Nanocrystalline diamond film; Pumping and jetting; Surface acoustic wave

Indexed keywords

ACOUSTIC PROPERTIES; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE VELOCITY; ACOUSTIC WAVES; DIAMOND FILMS; EFFICIENCY; ENERGY DISSIPATION; ENERGY EFFICIENCY; II-VI SEMICONDUCTORS; MICROFLUIDICS; NANOCRYSTALLINE SILICON; NANOCRYSTALS; SUBSTRATES; ZINC OXIDE;

EID: 84883262543     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-013-1155-3     Document Type: Article
Times cited : (16)

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