Characterization of the surface acoustic wave devices based on ZnO/nanocrystalline diamond structures

Physica Status Solidi (A) Applications and Materials Science

Volumn 210, Issue 8, 2013, Pages 1575-1583

  Pang, Hua Feng ^a,b   Garcia Gancedo, Luis ^c   Fu, Yong Qing ^b   Porro, Samuele ^d   Gu, Yan Wei ^b   Luo, J K ^e   Zu, Xiao Tao ^a   Placido, Frank ^b   Wilson, John I B ^d   Flewitt, Andrew J ^c   Milne, W I ^c  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b UNIVERSITY OF THE WEST OF SCOTLAND   (United Kingdom)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^d HERIOT WATT UNIVERSITY   (United Kingdom)

^e UNIVERSITY OF BOLTON   (United Kingdom)

Author keywords

diamond; nanocrystalline materials; sputtering; surface acoustic waves; thin films; ZnO

Indexed keywords

ROOM TEMPERATURE GROWTH; SIDE-LOBE SUPPRESSION; SPUTTERING TECHNIQUES; SPUTTERING TECHNOLOGY; SURFACE ACOUSTIC WAVES; TEMPERATURE COEFFICIENT OF FREQUENCIES; ULTRA-NANOCRYSTALLINE DIAMOND; ZNO;

ACOUSTIC WAVES; DIAMONDS; METALLIC FILMS; NANOCRYSTALLINE MATERIALS; NANOCRYSTALLINE SILICON; OPTIMIZATION; SPUTTERING; THIN FILMS; ZINC OXIDE;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 84882315071     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.201228631     Document Type: Article

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