Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading

Biosensors and Bioelectronics

Volumn 38, Issue 1, 2012, Pages 369-374

  Garcia Gancedo L ^a   Pedros J ^b   Zhao, X B ^c,d   Ashley, G M ^e   Flewitt, A J ^a   Milne, W I ^a,e   Ford, C J B ^b   Lu, J R ^c   Luo, J K ^f  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c UNIVERSITY OF MANCHESTER   (United Kingdom)

^d UNIVERSITY OF SHEFFIELD   (United Kingdom)

^e Kyung Hee University   (South Korea)

^f UNIVERSITY OF BOLTON   (United Kingdom)

Author keywords

FBAR; Gravimetric biosensor; Piezoelectric biosensor; Zinc oxide (ZnO)

Indexed keywords

DUAL MODES; FALSE POSITIVE; FBAR; MASS LOAD; MASS LOADINGS; MULTIPLE RESONANCES; NEGATIVE FREQUENCY; NEGATIVE SHIFT; PIEZOELECTRIC BIOSENSORS; POSITIVE FREQUENCIES; REFERENCE DEVICES; RESONANCE FREQUENCIES; RESONANCE MODE; TEMPERATURE CHANGES; TEMPERATURE VARIATION; THEORETICAL CALCULATIONS; THIN-FILM BULK ACOUSTIC WAVE RESONATOR; ZINC OXIDE (ZNO);

ACOUSTIC SURFACE WAVE FILTERS; BIOSENSORS; FINITE ELEMENT METHOD; FREQUENCY SHIFT KEYING; THIN FILMS; WAVE FILTERS; ZINC OXIDE;

LOADING;

SILICON DIOXIDE; ZINC OXIDE;

ANALYTIC METHOD; ANALYTICAL PARAMETERS; ARTICLE; BIOLOGICAL MONITORING; BIOSENSOR; CONTROLLED STUDY; COUPLING FACTOR; CRYSTALLIZATION; DEEP REACTIVE ION ETCHING; DUAL MODE THIN FILM BULK ACOUSTIC WAVE RESONATOR; FINITE ELEMENT ANALYSIS; MASS LOADING; MICROELECTROMECHANICAL SYSTEM; PROCESS OPTIMIZATION; QUALITY CONTROL; ROOM TEMPERATURE; TEMPERATURE; TEMPERATURE MEASUREMENT; THERMOGRAVIMETRY;

ACOUSTICS; ADSORPTION; ANIMALS; BIOSENSING TECHNIQUES; EQUIPMENT DESIGN; GRAVITATION; HUMANS; PROTEINS; SOUND; TEMPERATURE; TRANSDUCERS; X-RAY DIFFRACTION; ZINC OXIDE;

EID: 84864392560     PISSN: 09565663     EISSN: 18734235     Source Type: Journal    
DOI: 10.1016/j.bios.2012.06.023     Document Type: Article

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