Spetroscopic ellipsometry study on electrical and elemental properties of Sb-doped ZnO thin films

Current Applied Physics

Volumn 15, Issue 4, 2015, Pages 479-485

  Pandey, Sushil Kumar ^a   Awasthi, Vishnu ^a   Verma, Shruti ^a   Gupta, Mukul ^b   Mukherjee, Shaibal ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY INDORE   (India)

^b University Grant Commission Department of Atomic Energy Consortium for Scientific Research   (India)

Author keywords

DIBSD; Spectroscopic ellipsometry; SZO; XPS; XRD

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; ELLIPSOMETRY; ENERGY GAP; ION BEAMS; SEMICONDUCTOR DOPING; SPECTROSCOPIC ELLIPSOMETRY; SPUTTERING; THIN FILMS; X RAY DIFFRACTION; ZINC; ZINC OXIDE;

COMPLEX DIELECTRIC FUNCTIONS; DIBSD; DUAL ION BEAM SPUTTERING; ELECTRON CONCENTRATION; OPTICAL BAND GAP ENERGY; SZO; X-RAY DIFFRACTION MEASUREMENTS; XRD;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 84922342458     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2015.02.008     Document Type: Article

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