A spectroscopic ellispometric study of the tunability of the optical constants and thickness of GeOx films with swift heavy ions

Journal of Applied Physics

Volumn 110, Issue 6, 2011, Pages

  Vijayarangamuthu, K ^a   Singh, Chaman ^a   Kabiraj, D ^b   Rath, Shyama ^a  

^a UNIVERSITY OF DELHI   (India)

^b INTER UNIVERSITY ACCELERATOR CENTRE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM EVAPORATION; ELLIPSOMETRIC MEASUREMENTS; FLUENCES; ION FLUENCES; LAYER THICKNESS; ROOM TEMPERATURE; RUTHERFORD BACK-SCATTERING; STOICHIOMETRIC CHANGES; STRUCTURAL TRANSFORMATION; SWIFT HEAVY IONS; TAUC-LORENTZ MODELS; THERMAL SPIKES; THICKNESS OF THE FILM; TUNABILITIES;

ELLIPSOMETRY; GERMANIUM; HEAVY IONS; IRRADIATION; OPTICAL CONSTANTS; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

SILVER;

EID: 80053512526     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3638700     Document Type: Article

References (38)

1. Z.-Y. Yin, Z. Y. Lin, and B. K. Garside, Appl. Opt. B 21, 4324 (1982). 10.1364/AO.21.004324
2. T. Ohta, M. Takenage, N. Akahira, and T. Yamashita, J. Appl. Phys. 53, 8497 (1982). 10.1063/1.330483
3. K. F. Charles, K. Pita, N. Q. Ngo, and C. H. Kam, Optics Express 13 (3), 1049 (2005). 10.1364/OPEX.13.001049
4. M. Ardyanian, H. Rinnert, X. Devaux, and M. Vernat, Appl. Phys. Lett. 89, 011902 (2006). 10.1063/1.2218830
5. K. Vijayarangamuthu, S. Rath, D. Kabiraj, D. K. Avasthi, P. K. Kulriya, V. N. Singh, and B. R. Mehta, J. Vac. Sci. Technol. A 27, 731 (2009). 10.1116/1.3155402
6. S. Rath, D. Kabiraj, A. Tripathi, D. K. Avasthi, K. P. Jain, M. Kumar, H. S. Mavi, and A. K. Shukla, Nucl. Instrum. Methods B 263, 419 (2007). 10.1016/j.nimb.2007.07.018
7. F. Zernike, Integrated Optics (Topics in Applied Physics) vol 7, edited by, T. Tamir, (Springer, New York, 1979).
8. P. D. Townsend, P. J. Chandler, and L. Zhang, Optical Effects of Ion Implantation (Cambridge University Press, Cambridge, United Kingdom, 1994).
9. M. Fujimaki, Y. Ohki, and J. L. Brener, Opt. Lett. 25 (2) 88 (2000). 10.1364/OL.25.000088
10. M. Essid, J. L. Brebner, and J. Albert, Nucl. Instrum Methods B 141, 616 (1998). 10.1016/S0168-583X(98)00163-3
11. P. J. Hughes, A. P. Knights, and B. L. Weiss, Appl.Phys. Lett. 74 (22), 3311 (1999). 10.1063/1.123328
12. P. D. Townsend, Nucl. Instrum Methods B 65, 243 (1992). 10.1016/0168-583X(92)95042-P
13. P. D. Townsend, Vacuum 51, 301 (1998). 10.1016/S0042-207X(98)00179-1
14. G. G. L. Destefanis, J. P. Gailliard, E. L. Ligeon, S. Valett, B. W. Farmery, and P. D. Townsend, J. Appl. Phys. 50, 7898 (1979). 10.1063/1.325982
15. H. Lu, F. Lu, F. Chen, B. R. Shi, K. M. Wang, and D. Y. Shen, J. Appl. Phys. 89, 5224 (2001). 10.1063/1.1367312
16. G. G. Bentini, M. Bianconi, M. Chiarini, L. Correra, C. Sada, P. Mazzoldi, N. Argiolas, M. Bazzan, and R. Guzzi, J. Appl. Phys. 92, 6477 (2002). 10.1063/1.1516843
17. G. V. Vzquez, J. Rickards, Lifante, M. Domenech, and Cantelar, Opt. Express 11, 1291 (2003).
18. J. Olivares, G. Garca, A. Garca-Navarro, F. Agull-Lpez, O. Caballero, and A. Garca- Cabaes, Appl. Phys. Lett. 86, 183501 (2005). 10.1063/1.1922082
19. T. Ruiz, A. Mendez, M. Carrascosa, J. Carnicerol, A. Garca-Cabanes, J. Olivares, F. Agullo-Lopez, A. Garcia-Navarro, and G. Garca, J. Phys. D: Appl. Phys. 40, 4454 (2007). 10.1088/0022-3727/40/15/011
20. www.srim.org
21. J. Y. Zhang, X. M. Bao, and Y. H. Ye, Thin Solid Films 323, 68 (1998). 10.1016/S0040-6090(97)01032-8
22. D. A. Jishiashvili and E. R. Kutelia, Phys. Status Solidi B 143, K147 (1987). 10.1002/pssb.2221430253
23. X. Niu, W. Zhag, E. Zhang, J. Sun, and G. Lu, J. Crystal Growth 263, 167 (2004). 10.1016/j.jcrysgro.2003.12.002
24. J. Tauc, R. Grigorovici, and A. Vancu, Phys. Status Solidi 15, 627 (1966). 10.1002/pssb.v15:2
25. G. E. Jellison, Jr. and F. A. Modine, App. Phys. Lett. 69, 2137 (1996). 10.1063/1.118155
26. K. Postava, H. Sueki, M. Aoyama, T. Yamaguchi, Ch. Ino, Y. Igasaki, and M. Horie, J. Appl. Phys. 87, 7820 (2000). 10.1063/1.373461
27. CRC Handbook of Physics and Chemistry, 66th edition, edited by, R C Weast, (CRC Press, Boca Raton, FL (1986).
28. S. M. A. Durrani, M. F. Al-Kuhaili, and E. E. Khawaja, J. Phys.: Condens. Matter 15, 8123 (2003). 10.1088/0953-8984/15/47/015
29. H. Rinnert, M. Vergnat, and A. Burneau, J. Appl. Phys. 89, 237 (2001). 10.1063/1.1330557
30. M. Toulemonde, C. Dufour, and E. Paumier, Phys. Rev. B 46, 14362 (1992). 10.1103/PhysRevB.46.14362
31. J. Nakata, J. Appl. Phys 79, 682 (1996). 10.1063/1.360813
32. M. Toulemonde, W. J. Weber, G. Li, V. Shutthanandan, P. Kluth, T. Yang, Y. Wang., and Y. Zhang. Phys. Rev. B 83, 054106 (2011)
33. D. Rodichev, P. Lavallard, E. Dooryhee, A. Slaoui, J. Perriere, M. Gandais, and Y. Wang, Nucl. Instrum. Methods B, 107, 259 (1996). 10.1016/0168-583X(95)01043-2
34. P. S. Chaudhari, T. M. Bhave, D. Kanjilal, and S. V. Bhoraskar, J.Appl. Phys. 93, 3486 (2003). 10.1063/1.1542913
35. A. D. Touboul, J. F. Carlotti, M. Marinoni, M, Cussanel, M. Ramonda, C. Guasch, G. Bruguier, J. Bonnet, F. Saigne, and J. Gasiot, J. Non-crsyt. Solids 351, 3834 (2005). 10.1016/j.jnoncrysol.2005.10.017
36. N. Tripathi, S. Rath, P. Kulriya, S. A. Khan, D. Kabiraj, and D. K. Avasthi. Nucl. Instrum. Methods B, 268, 3335 (2010). 10.1016/j.nimb.2010.07.009
37. S. Kashimura, M. R. Islam, M. Takeuchi, A. Hongo, K. Ohira, K. Imoto, and S. Kuma, Appl. Surf. Sci. 148, 58 (1999). 10.1016/S0169-4332(98)00631-X
38. W. M. Arnoldbik N. Tomozeiu, and F. H. P. M. Habraken, Nucl. Instrum Methods B, 203, 151 (2003) 10.1016/S0168-583X(02)02203-6