Extraction of optical constants of zinc oxide thin films by ellipsometry with various models

Thin Solid Films

Volumn 510, Issue 1-2, 2006, Pages 32-38

  Liu, Y C ^a   Hsieh, J H ^b   Tung, S K ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Model; Optical constants; Zinc oxide

Indexed keywords

CATHODES; DISPERSIONS; ELLIPSOMETRY; MATHEMATICAL MODELS; REFRACTIVE INDEX; THIN FILMS;

CAUCHY MODEL; OPTICAL CONSTANTS; POINT-BY-POINT FITTING;

ZINC OXIDE;

EID: 33646535605     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.10.089     Document Type: Article

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