Epitaxial growth of ZnO thin films on R-plane sapphire substrate by radio frequency magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 1103-1107

  Kim, Young Jin ^a   Kim, Yoo Taek ^a   Yang, Hyung Kook ^b   Park, Jong Chul ^b   Han, Jung In ^b   Lee, Yong Eui ^c   Kim, Hyeong Joon ^c  

^a Kyonggi University   (South Korea)

^b Korea Electronic Technology Institute (KETI)   (South Korea)

^c Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5844272071     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580437     Document Type: Article

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