Dynamic in situ spectroscopic ellipsometric study in inhomogeneous TiO 2 thin-film growth

Journal of Applied Physics

Volumn 108, Issue 1, 2010, Pages

  Horprathum, M ^a   Chindaudom, P ^a   Limnonthakul, P ^b   Eiamchai, P ^a   Nuntawong, N ^a   Patthanasettakul, V ^a   Pokaipisit, A ^c,d   Limsuwan, P ^c,d  

^a NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

^b SRINAKHARINWIROT UNIVERSITY   (Thailand)

^c Thailand Ministry of Science and Technology   (Thailand)

^d KING MONGKUT'S UNIVERSITY OF TECHNOLOGY THONBURI   (Thailand)

Author keywords

[No Author keywords available]

Indexed keywords

DOUBLE LAYERS; DYNAMIC FIT; EXPERIMENTAL DATA; GROWTH MODELS; GROWTH PROCESS; IN-SITU; INHOMOGENEITIES; ISLAND FILMS; LORENTZ; MICRO-STRUCTURAL; NUCLEATION STAGES; OPTICAL MODELS; PHASE CHANGE; PHYSICAL MODEL; SINGLE LAYER FILMS; SPECTROSCOPIC ELLIPSOMETERS; TIO; ULTRA-THIN;

COALESCENCE; DYNAMICS; ELLIPSOMETRY; PHASE TRANSITIONS; REFRACTIVE INDEX; THIN FILMS;

FILM GROWTH;

EID: 77955205531     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3457839     Document Type: Article

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