Fast response integrated MEMS microheaters for ultra low power gas detection

Sensors and Actuators, A: Physical

Volumn 223, Issue , 2015, Pages 67-75

  Zhou, Qin ^a,b   Sussman, Allen ^a   Chang, Jiyoung ^a   Dong, Jeffrey ^a   Zettl, Alex ^a,b   Mickelson, William ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Gas sensor; Low power; Microheaters; Semiconducting metal oxide; Transient temperature response

Indexed keywords

GAS DETECTORS; HEATING EQUIPMENT; METALLIC COMPOUNDS; MICROELECTROMECHANICAL DEVICES; TEMPERATURE;

BATTERY POWERED DEVICES; LOW POWER; MICRO-HEATERS; PROOF-OF-PRINCIPLE EXPERIMENTS; SEMI-CONDUCTING METAL OXIDES; SHORT RESPONSE TIME; TRANSIENT TEMPERATURE; TRANSIENT TEMPERATURE RESPONSE;

CHEMICAL SENSORS;

EID: 84921755621     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2014.12.005     Document Type: Article

References (35)

1. F.-G. Banica, Chemical Sensors and Biosensors: Fundamentals and Applications, John Wiley & Sons, 2012, http://dx.doi.org/10.1002/9781118354162.
2. I. Simon, N. Bârsan, M. Bauer, U. Weimar, Micromachined metal oxide gas sensors: opportunities to improve sensor performance, Sens. Actuators B: Chem. 73 (2001) 1-26, http://dx.doi.org/10.1016/S0925-4005(00)00639-0.
3. S.Z. Ali, F. Udrea, W.I. Milne, J.W. Gardner, Tungsten-based SOI microhotplates for smart gas sensors, Microelectromech. Syst. J. 17 (2008) 1408-1417, http://dx.doi.org/10.1109/JMEMS.2008.2007228.
4. U. Dibbern, A substrate for thin-film gas sensors in microelectronic technology, Sens. Actuators B: Chem. 2 (1990) 63-70, http://dx.doi.org/10.1016/0925-4005(90)80010-W.
5. J.S. Suehle, R.E. Cavicchi, M. Gaitan, S. Semancik, Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing, IEEE Electron Device Lett. 14 (1993) 118-120, http://dx.doi.org/10.1109/55.215130.
6. M. Zanini, J.H. Visser, L. Rimai, R.E. Soltis, A. Kovalchuk, D.W. Hoffman, et al., Fabrication and properties of a Si-based high-sensitivity microcalorimetric gas sensor, Sens. Actuators A: Phys. 48 (1995) 187-192, http://dx.doi.org/10.1016/0924-4247(95)01000-9.
7. J.W. Gardner, A. Pike, N.F. de Rooij, M. Koudelka-Hep, P.A. Clerc, A. Hierlemann, et al., Integrated array sensor for detecting organic solvents, Sens. Actuators B: Chem. 26 (1995) 135-139, http://dx.doi.org/10.1016/0925-4005(94)01573-Z.
8. 2 gas sensor using a FEM simulator, Sens. Actuators A: Phys. 69 (1998) 205-211, http://dx.doi.org/10.1016/S0924-4247(98)00096-X.
9. 2 concentrations with low power micromachined tin oxide gas sensors, Sens. Actuators B: Chem. 58 (1999) 325-329, http://dx.doi.org/10.1016/S0925-4005(99)00092-1.
10. F. Udrea, J.W. Gardner, D. Setiadi, J.A. Covington, T. Dogaru, C.C. Lu, et al., Design and simulations of SOI CMOS micro-hotplate gas sensors, Sens. Actuators B: Chem. 78 (2001) 180-190, http://dx.doi.org/10.1016/S0925-4005(01)00810-3.
11. J.C. Belmonte, J. Puigcorbé, J. Arbiol, A. Vilà, J.R. Morante, N. Sabaté, et al., High-temperature low-power performing micromachined suspended microhotplate for gas sensing applications, Sens. Actuators B: Chem. 114 (2006) 826-835, http://dx.doi.org/10.1016/j.snb.2005.07.057.
12. P.C. Chan, G. Yan, L. Sheng, R.K. Sharma, Z. Tang, J.K. Sin, et al., An integrated gas sensor technology using surface micro-machining, Sens. Actuators B: Chem. 82 (2002) 277-283, http://dx.doi.org/10.1016/S0925-4005(01)01064-4.
13. E. Barborini, S. Vinati, M. Leccardi, P. Repetto, G. Bertolini, O. Rorato, et al., Batch fabrication of metal oxide sensors on micro-hotplates, J. Micromech. Microeng. 18 (2008) 055015, http://dx.doi.org/10.1088/0960-1317/18/5/055015.
14. B. Guo, A. Bermak, P.C.H. Chan, G.-Z. Yan, An integrated surface micromachined convex microhotplate structure for tin oxide gas sensor array, IEEE Sens. J. 7 (2007) 1720-1726, http://dx.doi.org/10.1109/JSEN.2007.908919.
15. I. Elmi, S. Zampolli, E. Cozzani, M. Passini, G.C. Cardinali, M. Severi, Development of ultra low power consumption hotplates for gas sensing applications, in: 2006 5th IEEE Conf. Sensors, IEEE, 2006, pp. 243-246, http://dx.doi.org/10.1109/ICSENS.2007.355767.
16. P. Fürjes, C. Dücso{combining double acute accent}, M. Ádám, J. Zettner, I. Bársony, Thermal characterisation of micro-hotplates used in sensor structures, Superlattices Microstruct. 35 (2004) 455-464, http://dx.doi.org/10.1016/j.spmi.2003.09.007.
17. C. Tsamis, A.G. Nassiopoulou, A. Tserepi, Thermal properties of suspended porous silicon micro-hotplates for sensor applications, Sens. Actuators B: Chem. 95 (2003) 78-82, http://dx.doi.org/10.1016/S0925-4005(03)00409-X.
18. M. Noor, G. Sugandi, Effects of material and membrane structure on maximum temperature of microheater for gas sensor applications, . . . Electron. (ICSE). . ., 2014, pp. 255-258. http://ieeexplore.ieee.org/xpls/abs all.jsp?arnumber=6920845 (accessed 03.11.14).
19. 5OH gas sensor based on micro-heater and ink jetting technique, Sens. Actuators B: Chem. (2014) (in press) http://www.sciencedirect.com/science/article/pii/S0925400514012441.
20. S. Das, J. Akhtar, Coefficient of resistance (TCR) of the E-beam and sputter deposited nichrome thin film for precise temperature control of microheater for MEMS gas sensor, Phys. Semicond. Devices 124 (2014) 495-497, http://link.springer.com/chapter/10.1007/978-3-319-03002-9-124.
21. J. Yadav, V. Mishra, M. Prasad, Design and partial fabrication of low power Pt-based microheater for gas sensing application, INROADS: Int. J. Jaipur Natl. Univ. 3 (2014) 261-265, http://www.indianjournals.com/ijor.aspx?target=ijor:inroads&volume=3&issue=1s&article=051.
22. A. Harley-Trochimczyk, J. Chang, Q. Zhou, Catalytic hydrogen sensing using microheated platinum nanoparticle-loaded graphene aerogel, Sens. Actuators B: Chem. 206 (2014) 399-406, http://www.sciencedirect.com/science/article/pii/S0925400514011265.
23. F. Hossein-Babaei, A. Amini, Recognition of complex odors with a single generic tin oxide gas sensor, Sens. Actuators B: Chem. 194 (2014) 156-163, http://www.sciencedirect.com/science/article/pii/S0925400513015347.
24. H. Kumar, K. Singh, N. Sood, Design and simulation of a Micro Hotplate for MEMS based integrated gas sensing system, Sens. Actuators B: Chem. (2014) 181-184, http://ieeexplore.ieee.org/xpls/abs all.jsp?arnumber=6798942.
25. 2 thin film and microheater using Pt catalyst, Adv. Sci. Lett. 20 (2014) 953-995, http://www.ingentaconnect.com/content/asp/asl/2014/00000020/F0020005/art00011.
26. W. Mickelson, A. Sussman, A. Zettl, Low-power, fast, selective nanoparticle-based hydrogen sulfide gas sensor, Appl. Phys. Lett. 100 (2012) 173110, http://dx.doi.org/10.1063/1.3703761.
27. M.Y. Afridi, J.S. Suehle, M.E. Zaghloul, D.W. Berning, A.R. Hefner, R.E. Cavicchi, et al., A monolithic CMOS microhotplate-based gas sensor system, IEEE Sens. J. 2 (2002) 644-655, http://dx.doi.org/10.1109/JSEN.2002.807780.
28. D.-D. Lee, W.-Y. Chung, M.-S. Choi, J.-M. Baek, Low-power micro gas sensor, Sens. Actuators B: Chem. 33 (1996) 147-150, http://dx.doi.org/10.1016/0925-4005(96)01822-9.
29. J.R. Black, Electromigration: a brief survey and some recent results, IEEE Trans. Electron Devices 16 (1969) 338-347, http://dx.doi.org/10.1109/T-ED.1969.16754.
30. I.A. Blech, Electromigration in thin aluminum films on titanium nitride, J. Appl. Phys. 47 (1976) 1203-1208, http://dx.doi.org/10.1063/1.322842.
31. S.K. Fung, Z. Tang, P.C. Chan, J.K. Sin, P.W. Cheung, Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications, Sens. Actuators A: Phys. 54 (1996) 482-487, http://dx.doi.org/10.1016/S0924-4247(97)80008-8.
32. A. Götz, I. Gràcia, C. Cané, E. Lora-Tamayo, M. Horrillo, J. Getino, et al., A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbons, Sens. Actuators B: Chem. 44 (1997) 483-487, http://dx.doi.org/10.1016/S0925-4005(97)00171-8.
33. Y.-G. Kim, K.S. Gam, K.H. Kang, Thermoelectric properties of the Au/Pt thermocouple, Rev. Sci. Instrum. 69 (1998) 3577-3582, http://dx.doi.org/10.1063/1.1149141.
34. D.C. Ripple, G.W. Burns, Standard reference material 1749: Au/Pt thermocouple thermometer, NIST Spec. Publ. 260 (1998) 134.
35. R. Reay, Thermally and electrically isolated single crystal silicon structures in CMOS technology, IEE Electron Device Lett. 15 (1994) 399-401, http://ieeexplore.ieee.org/xpls/abs all.jsp?arnumber=320981 (accessed 03.11.14).