Design and simulation of a Micro Hotplate for MEMS based integrated gas sensing system

2014 IEEE Sensors Applications Symposium, SAS 2014 - Proceedings

Volumn , Issue , 2014, Pages 181-184

  Kumar, Hardeep ^a   Singh, K K ^a   Sood, Neeru ^a   Kumar, Anuj ^a   Mittal, R K ^a  

^a BIRLA INSTITUTE OF TECHNOLOGY AND SCIENCE   (United Arab Emirates)

Author keywords

COMSOL; Gas Sensor; MEMS; MHP

Indexed keywords

CHEMICAL DETECTION; GAS DETECTORS; MEMS;

COMSOL; DESIGN AND SIMULATION; GAS-SENSING SYSTEMS; METAL OXIDE GAS SENSORS; MHP; MICRO HOT-PLATE (MHP); OPERATING TEMPERATURE; UNIFORM TEMPERATURE;

CHEMICAL SENSORS;

EID: 84900024052     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SAS.2014.6798942     Document Type: Conference Paper

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